A correction to the nanoindentation technique for ultrashallow indenting depths
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A correction to the nanoindentation technique for ultrashallow indenting depths Chang-Dong Yeo and Andreas A. Polycarpoua) Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (Received 21 December 2006; accepted 21 May 2007)
A correction to the nanoindentation technique taking into account the elastic recovery at extremely shallow contact depths was proposed. Using a high-sensitivity nanoindentation system with a sharp indenting tip, the magnitude of the elastic recovery could be obtained directly from very low-force load–unload curves, which was then used to correct the contact area used for hardness measurements. Nanoindentation experiments were performed on a standard fused quartz sample and, compared to standard nanoindentation techniques, the proposed method was found to be more accurate at ultrashallow indenting depths of
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