A New Assembling Method for Nano-sized Particles Using an Electrified Pattern Drawn by a Focused Ion Beam
- PDF / 302,904 Bytes
- 6 Pages / 612 x 792 pts (letter) Page_size
- 35 Downloads / 148 Views
A New Assembling Method for Nano-sized Particles Using an Electrified Pattern Drawn by a Focused Ion Beam Hiroshi Fudouzi, Mikihiko Kobayashi and Norio Shinya 5th Research Group, National Research Institute for Metals 1-2-1, Sengen, Tsukuba, Ibaraki 305-0047, Japan ABSTRACT This paper describes a new technique to fabricate two-dimensional microstructures assembled with nano-sized particles. The nano-sized particles attract a lot of attention because of their unique properties compared to bulk materials. Micro- and nano- structures assembled with nano-sized particles have potential applications in electronic, optical and biochemical fields. The Self-Assembled Monolayer (SAM) film patterning is one of the methods to assemble the nano-sized particles. We have proposed a new method to assemble nano-sized particles on a substrate using an electric field generated by an electrified pattern. In this study, following our methods titanium oxide (TiO2, diam.=21nm) particles were patterned on an n-type (100) silicon substrate having an oxidized layer. The particle deposition on the substrates was carried out using a colloidal suspension process and an aerosol process. INTRODUCTION The assembly of particles is one of the building methods for the fabrication of twodimensionally controlled microstructures in the range of micro- to nanometer sizes [1,2]. These microstructures have been produced on patterned SAM films [3-8] and in micro-scale PDMS molds [9]. From another viewpoint, we have been developing a new patterning technique to assemble micro-scale particles using the electric field [10,11]. This technique is principally based on electrophotography [12]. The main procedure is composed of the following two steps: An electrified pattern is formed on a non-conductive substrate by scanning an electron beam [13]. The substrate with the electrified pattern is then dipped into the suspensions in which the micro-sized particles were dispersed. The micro-sized particles were arranged on the electrified pattern by the electrostatic force. The purpose of this paper is to present a newly developed process to assemble nano-sized particles on a substrate using an electric field. We have developed the following three techniques: Patterning an electric field on a silicon wafer covered with an oxide layer by scanning a focused ion beam, patterning nano-sized particles in liquid phase (colloidal process) and patterning nano-sized particles in gas phase (aerosol process). In this study, a commercially available Si(100) wafer having an oxide layer on the surface was used as a substrate and titanium dioxide, TiO2, was used as nano-sized particles. The Si wafer is one of the important materials in modern technology and TiO2 is a well known material in photo catalysis, photo semiconductor and photochemical applications. The patterned TiO2 particles have potential applications in advanced devices.
D9.8.1
THEORY A spherical particle is placed near an electrified spot formed on an insulating substrate in an insulating medium. A spatially non-unifo
Data Loading...
