A self-organized approach for scheduling semiconductor manufacturing systems
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A self-organized approach for scheduling semiconductor manufacturing systems Qingyun Yu1 · Haolin Yang2 · Kuo-Yi Lin1,2
· Li Li1,2
Received: 3 December 2019 / Accepted: 22 September 2020 © Springer Science+Business Media, LLC, part of Springer Nature 2020
Abstract In semiconductor manufacturing industry, traditional scheduling rules are not conducive to improving production capacity to autonomously adjust based on real-time status. To fill this gap, this study proposes a dynamic dispatching rule based on self-organization (DDRSO) to autogenerate optimal scheduling scheme through mechanisms of interaction, coordination and competition. Besides, an extended DDRSO is proposed to further consider hot lots and transient dynamic bottlenecks. Both DDRSO and E-DDRSO are designed from three aspects: role definition of self-organization units, negotiation mechanism among self-organization units, and decision methods. This research adopts a benchmark industrial manufacturing system to illustrate the availability of the proposed approach. Compared with heuristic dispatching strategies, DDRSO achieves improvement on MOV, TH and ODR by 4.9%, 9.06% and 20.23%, respectively. Meanwhile, E-DDRSO performs better than DDRSO under all workload levels. In addition, compared with a flexible dispatching method BPSO-SVM, E-DDRSO also obtain better performances, especially improvement on CT by 16.51%. Keywords Semiconductor manufacturing · Dynamic dispatching rule · Self-organization
Introduction Fab-wide scheduling is a complicated and difficult task (Qin et al. 2015; Kim et al. 2017; Li et al. 2015). It has multiple considerable characteristics: fluctuating demand, various product version, different priorities of jobs, unbalanced capacity, plenty of re-entrant phenomenon, hundreds of processing steps, alternative machines with the same recipe, and shifting bottlenecks (Bai et al. 2016; Ma et al. 2014; Chen et al. 2019). Diagram of fab-wide scheduling shows as Fig. 1. Due to extreme large capital investment, semiconductor manufacturers demand high overall equipment effectiveness and utilization (Zhong et al. 2017; Kao et al. 2018; Wang et al. 2014). The increased process complexity and decreased feature size lead to more frequent off-specification results, job rework and other uncertainty issues (Pan et al. 2014; Sang et al. 2015; Zhou et al. 2015). Consequently, scheduling
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Li Li [email protected]
1
College of Electronics and Information Engineering, Tongji University, Shanghai 201804, China
2
Shanghai Institute of Intelligent Science and Technology, Tongji University, Shanghai 201804, China
methods must be capable of responding quickly to realtime rework and disruption situations (Chung et al. 2019; Han et al. 2015; Parsa et al. 2017). As an effective way, dynamic dispatching rules have attracted growing attention in both academia and industries (Ham 2018; Ozturk et al. 2017; Qiao et al. 2019). Meanwhile, due to the complex and strong-coupling relations between upstream and downstream machines, the fab-wide dynamic dispatchi
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