A three-dimensional microfluidic mixer of a homogeneous mixing efficiency fabricated by ultrafast laser internal process
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A three‑dimensional microfluidic mixer of a homogeneous mixing efficiency fabricated by ultrafast laser internal processing of glass Wenbo Li1,2,3 · Wei Chu4 · Difeng Yin1,3 · Youting Liang4,5 · Peng Wang1,3,6 · Jia Qi1,3 · Zhe Wang1,2 · Jintian Lin1 · Min Wang4 · Zhenhua Wang4 · Ya Cheng1,4,5,7 Received: 26 April 2020 / Accepted: 15 September 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract We design a compact three-dimensional (3D) micromixer based on the Baker’s transformation concept and fabricate it in fused silica by ultrafast laser direct writing. One of the issues in the micromixer is the unbalanced mixing efficiencies between the center and boundary areas of the microfluidic channel. We overcome this problem by periodically exchanging the microstreams in the center and near the boundary which gives rise to improved mixing efficiency and uniformity. The performance of the fabricated micromixer is examined by mixing a blue and a yellow ink solution, showing efficient mixing with a high throughput. Keywords Ultrafast laser micromachining · Selective chemical etching · Microfluidics · Micromixer
1 Introduction
* Wei Chu [email protected] Ya Cheng [email protected] 1
State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra‑intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai 201800, China
2
School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, People’s Republic of China
3
University of Chinese Academy of Sciences, Beijing 100049, People’s Republic of China
4
XXL ‑ The Extreme Optoelectromechanics Laboratory, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, People’s Republic of China
5
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, People’s Republic of China
6
School of Physics Science and Engineering, Tongji University, Shanghai 200092, People’s Republic of China
7
Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, Shanxi, People’s Republic of China
Nowadays ultrafast laser micromachining has been proved to be an effective approach for three-dimensional (3D) microfabrication in transparent materials [1, 2]. Thanks to the extreme flexibility provided by the maskless direct writing fabrication scheme [3], ultrafast laser micromachining can produce arbitrary 3D structures inside transparent materials initiated by the nonlinear optical absorption confined in the vicinity of the focal spot. Therefore, interaction of the focused ultrafast laser pulses with the transparent materials leads to various types of modifications of the material properties ranging from optical refractive index, density, and Young’s module to compositional distribution and chemical stability [4–7]. Among a broad range of applications, the ultrafast laser irradiation followed by selective chemical etching (ULICE) technique, which en
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