An Approach to Nanoglasses through Anodic Oxidation of Sputtered Aluminum on Glass Surface
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An Approach to Nanoglasses through Anodic Oxidation of Sputtered Aluminum on Glass Surface Satoru Inoue, Song-Zhu Chu, Kenji Wada National Institute for Materials Science, Advanced Materials Laboratory, Namiki 1-1, Tsukuba, Ibaraki, 305-0044, Japan ABSTRACT The new processes for the preparation of nanoglasses have been developed through anodic oxidation. The aluminum thin film sputtered on the ITO thin film on the glass surface was decomposed into alumina by anodic oxidation technique. The alumina layer possessed nanometer size pore array standing on the glass surface. The sizes of the pore was widened by acid etching from 10~20nm to a few hundred nm. The glass substrate having the alumina nanostructures on the surface could transmit the UV and visible light at the wavelength range of 200 ~ 800nm. The TiO2 sol was impregnated into the pores of alumina layer and the sample was heated at ~ 400 ºC for 2 hr, converted into TiO2 nanotubes of anatase phase. The acid etching could remove the alumina skeletons, leaving the TiO2 nanotube array on the glass surface. These glasses were transparent to the light in UV-visible region. The electro deposition technique was applied to the introduction of Ni metal into pores, giving Ni nanorod array on the glass surface. The glass samples possessing TiO2 nanotube array showed very good catalytic function on the decomposition of acetaldehyde gas under the irradiation of UV light. The effect of the dimensions of the Ni nanorods on the magnetization was investigated. INTRODUCTION The anodic oxidation of aluminum has been used as the method to convert the aluminum surface into alumina for the improvement of the chemical durability. The anodic oxidation technique is known as the self organization process to generate the porous alumina where the nanopores are arranged as perpendicular to the substrate. Recently nanostructured materials have attracted great interest for their potentiality leading to the unique functions in the optical properties, electronic properties, magnetic properties and mechanical properties. In these years, the porous anodic alumina has been studied to fabricate the nanostructured materials [1~5]. The anodic oxidation of the thin aluminum film has been studied recently on the sputtered aluminum film on the Ta [6] and the Si [7] substrate, resulting in the oxidation of the aluminum layer followed by the oxidation of the substrate. The authors have been studying the formation of the nanostructures on glass surfaces and have developed the new process in which the sputtered alumina film on the conductive layer (tin-doped indium oxide (ITO)) on the glass substrate was converted into the nanostructures by anodic oxidation [8]. The authors have also been studying the processes to introduce other compounds into nanopores of the anodic alumina using sol-gel technique and electro deposition. The TiO2 component could be introduced by sol-gel process [9,10] giving the high efficiency photo catalytic function [11]. The density of the nanopores of the alumina nanostructur
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