An electrostatically actuated microsensor for determination of micropolar fluid physical properties
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ORIGINAL PAPERS
An electrostatically actuated microsensor for determination of micropolar fluid physical properties Mina Ghanbari
. Ghader Rezazadeh
Received: 6 May 2020 / Accepted: 11 September 2020 © Springer Nature B.V. 2020
Abstract Micropolar fluids as complex non-Newtonian fluids admittedly have numerous applications in various fields, especially in medicine. Blood as a micropolar fluid plays an important role in regulating the body’s system and maintaining homeostasis. Physical properties of micropolar fluids, especially their viscosity, affect their rheological behavior significantly. Therefore, measurement of viscosity of these complex fluids especially human blood seems very necessary as it is considered a key parameter in the diagnosis and treatment of several diseases. In this paper, a new comb-drive microsensor for estimation of physical properties of micropolar fluids is presented. Driving and sensing combs, a sensing plate attached to the shuttle of the resonator form the structure of the electrostatic sensor. The nonlinear dynamic behavior of the sensor due to the presence of the electrostatic force has been investigated to obtain the limitations of the linear behavior of the structure. It has been shown that calculating the M. Ghanbari (&) Mechanical Engineering Department, Engineering Faculty of Khoy, Urmia University, Urmia, Iran e-mail: [email protected] G. Rezazadeh Mechanical Engineering Department, Faculty of Engineering, Urmia University, Urmia, Iran G. Rezazadeh South Ural State University, Chelyabinsk, Russian Federation
resonance frequency and resonance amplitude variations of the lumped dynamic model of the sensor arising from damping and inertial effects of the fluid can lead to the determination of the physical properties of a micropolar fluid. The effects of the geometrical parameters of the sensor and the applied exciting voltage on the performance of the sensor have also been studied. Keywords Micropolar fluid · Viscometer · Densitometer · Comb-drive · MEMS · Frequency response
1 Introduction Physically, the fluids consisting of the spherical rigid and randomly oriented microparticles suspended in a viscous medium are called micropolar fluids [1]. Micropolar fluids as a complex non-Newtonian fluid belong to a class of fluids with microstructures assuming that their internal microparticles may rotate independently of the fluid vorticity [2, 3]. Micropolar fluids as bubbly liquids, liquid crystals, blood, polymeric suspensions, and lubricant fluids, and so on, have numerous industrial and bioengineering applications as contaminated and clean engine lubricants, cervical flows, thrust bearing technologies, and radial diffusion paint rheology [4–7]. This class of fluids exhibits a wrapped constitutive relationship dealing with a couple stress tensor in addition to a
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Meccanica
non-symmetric stress tensor [8]. The nonlinear relations governing between the stress and strain tensor and also between the temperature gradient and
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