Application of Dispersed Nano Particles

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Application of Dispersed Nano Particles Masaaki Oda, Tomoyuki Abe, Toshihiro Suzuki, Norimich Saito, Hisashi Iwashige and Ghalip Kutluk Nanoparticle Application Department, Ulvac Corporation 516 Yokota, Sanbu-cho, Sanbugun, Chiba-pref. Japan, 289-1297 ABSTRACT Nano-particles can become one of the best materials for forming thin and fine pitch films at low temperature, if particles are individually dispersed densely in a solvent. Individually dispersed metal(gold, silver, copper) nano-particle(d-nano particle) are formed at a state of suspension in an organic solvent by the modified gas evaporation method where formed particles are covered with an organic surfactant just after their formation. The particle formed by the gas evaporation method are metal impurity free and have a narrow size distribution. This suspension is condensed and used as a formed of solution or paste. D-nano particle solution or paste can be baked at 200-300C to form metal thin films. These has been applied to PDP electrode repairing, coloring of car window glass, a filler of electric conductive resin paste and ULSI interconnection formation. NTRODUCTION During the past several years, increasing interest has focused on ultra fine particles(UFP) with the anticipation that they will be superior to conventional materials in magnetic properties, catalytic properties, sintering properties and mechanical properties. Metal nano-particles are easily coalesced or sintered in low temperature as much as 300C, because of having an active large surface area. Thus usual nano-particles prepared so far are handled as aggregated powder or a diluted particle suspension. Nano-particles can become one of the best materials for forming thin and fine pitch films at low temperature, if particles are individually dispersed densely in a solvent. Individually dispersed metal nano-particles can be formed by the modified gas evaporation method, where formed particles are covered with an organic surfactant just after their formation.[1] The particles formed by the gas evaporation method are metal impurity free and have a narrow size distribution because they are formed through the process of evaporation and condensation in an inactive gas atmosphere.[2] In this report, properties and applications of individually dispersed nano-particle (d-nano particle) pastes or solution will be reported. EXPERIMENTAL Formation of dispersed nano particles Nano-particles are formed by the modified gas evaporation method. The evaporated metal atoms are collided with inert gas atoms and cooled down condensing into particles. The organic solvent vapor is deposited on surfaces of particles to form an organic solvent layer. The particles

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are collected in a form of suspension in an organic solvent. The suspension is stored in the reservoir. Two kinds of surfactants are supplied to the suspension to stabilize it.a-Terpineol is usually used as a dispersing organic solvent. In the solution, particles of 2-10 nm in a size are suspended in an organic solvent without aggregations, because th