Characterization of Electron-Beam-Induced Silver Deposition from Liquid Phase
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Characterization of Electron-Beam-Induced Silver Deposition from Liquid Phase Jonathan J. Park1, Alexandra Joshi-Imre2, Leonidas E. Ocola2, and Ralu Divan2 Illinois Mathematics and Science Academy, 500 W. Sullivan Rd, Aurora, IL 60506. Contact: [email protected] 2 Center for Nanoscale Materials, Argonne National Laboratory, 9700 S-Cass Ave., Argonne, IL 60439, U.S.A. 1
ABSTRACT Electron-beam-induced deposition (EBID) using gas-phase precursor molecules is an extensively studied fabrication technique. Liquid-phase metal deposition has recently been shown to achieve higher purity levels than traditional gas-phase deposition [1]. The goal of this investigation was to characterize liquid-phase silver deposition for further studies in photonics. A Scanning Electron Microscope (SEM) (FEI Nova 600 NanoLab Dual Beam) was used to deposit silver on polyimide membranes from aqueous AgNO3 solution by accelerating electrons into the solution for silver ion reduction. Atomic Force Microscopy (AFM) and SEM were subsequently used to characterize the size dependence to electron dosage. We observed granular silver deposits with sub-75 nm particle size and 200-250 nm total aggregate diameters. The CASINO (monte CArlo SImulation of electroN trajectory in sOlids) program was used to model electron trajectory in the solution to relate the size to the electron spread. INTRODUCTION Preparation of metal or dielectric nanoparticles on various substrates is a key issue in all fields of modern science and technology covering electronics [2], photonics [3], catalysis [4], and biochemical sensors [5] due to their unique electric and optical properties. Monodisperse nanoparticles, for example, have been proposed as a basis for single electron transistors [6]. Yet potential applications require precise spatial control over nanoparticle assembly on different surfaces. The development of relatively simple techniques for the assembly of nanoparticles in well-defined, controlled arrays is a central objective in nanoscience. In addition to the conventional gas phase, electrochemical, and electroless wet chemical deposition methods, other techniques utilizing lasers, ion-beams, electron-beams, and high-energy x-rays produced by synchrotron radiation sources were reported to produce nanocrystalline metallic deposition onto different substrates with desired chemical and morphological state(s) [7-10]. Use of ionizing radiation, such as energetic beams of electrons or ions, short-wavelength UV, and X-rays, is particularly attractive since lithographic techniques can be integrated into the synthesis step in addition to providing different chemical pathways for control of nucleation and growth. Thus, one can fabricate arbitrarily micropatterned regions containing engineered fields or arrays of nanoparticles in a single lithographic step. Electron-beam-induced deposition (EBID) from liquid precursor for producing metal nanostructures is a novel nanofabrication method based on the reduction of metal ions when a liquid-phase metal-salt solut
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