Chemical Failure Mode Addition to the Failure Mode Taxonomy
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TECHNICAL ARTICLE—PEER-REVIEWED
Chemical Failure Mode Addition to the Failure Mode Taxonomy Carlton Washburn • Katie Grantham
Submitted: 30 May 2012 / in revised form: 23 July 2012 / Published online: 24 August 2012 Ó ASM International 2012
Abstract The research objective of this article is to fortify the failure mode taxonomy by including chemical failures. This inclusion would enable comprehensive risk analysis in technology-based products. As technology improves at an exponential rate, partially owing to chemical advances in the semiconductor industry, failure identification tools must keep up with the pace. While the current version of the failure mode taxonomy does consider multiple domains of failure, it does not include a comprehensive collection of chemical failures. Therefore this taxonomy is insufficient for a large number of new products. The research presented here includes identifying chemical failures from publications in the semiconductor industry. These failures were then analyzed to determine the rudimentary failure modes in each case. Finally the newly identified failure modes were added to the failure mode taxonomy. A case study is presented to demonstrate using the updated failure mode taxonomy to identify both potential failures and product risks. Keywords Failure analysis Failure mode Taxonomy Chemical Lithography
Introduction The research objective of this article is to fortify the failure mode taxonomy also including chemical failures, which will enable comprehensive risk analysis in technologybased products, specifically focusing on the semiconductor C. Washburn (&) K. Grantham Missouri University of Science and Technology, 1870 Miner Circle, Rolla, MO 65409, USA e-mail: [email protected]
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industry. The semiconductor industry produces a large number of computer chips, including microprocessors, to memory, to integrated circuits (ICs), system on a chip (SOC), and so on. The use of chips ranges from common home appliances, such as dishwashers and microwaves, to more complex systems, such as, tablet computers and servers. The broad use of computer devices in modern society, coupled with a global market, supports the $323.3 billion market worldwide [1]. The capability of a chip is associated with its processing speed. The release of more sophisticated products depends on how fast chips operate. The rate of semiconductor technology development is often modeled following Moore’s Law [2]. Moore’s law is a model that states that every 2 years, the number of transistors on an individual chip will double [2]. The semiconductor industry has followed this law for decades. Moore’s law has subsequently driven a smaller, faster, cheaper approach to both chip design and manufacturing. Further, a smaller, faster, cheaper approach has been enabled by advancements in both tools and materials for patterning devices. Much of the material development has centered on chemicals and their use in the lithography process. The lithography process, similar to a negative producing a photograph, produces
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