Controlled assemble and microfabrication of zeolite particles on SiO 2 substrates for potential biosensor applications
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1129-V03-02
Controlled assemble and microfabrication of zeolite particles on SiO2 substrates for potential biosensor applications S. Ozturk1,4, K. Kamısoglu2, R. Turan1,3, B. Akata1, 4 Micro and Nanotechnology Department, 2Chemical Engineering Department, 3 Department of Physics, 4Central Laboratory Middle East Technical University, Ankara, 06531 Turkey 1
ABSTRACT Zeolite nanoparticles were organized into functional entities on SiO2 substrates and microfabrication technique was tested to form patterns of zeolite nanoparticles on SiO2 using the electron beam lithography (EBL). The effect of different techniques for efficient zeolite assembly on the SiO2 substrates was investigated. For this purpose, three different assembly techniques were tested. The first two methods are spin-coating (SC) and ultrasound aided strong agitation (US) methods, which were tested using bare and silanized zeolite nanoparticles. The third technique is the manual assembly method, which was also investigated using bare zeolites. All methods were facile in terms of experimental approach. Full coverage of the substrate was obtained after all three methods, however strong agitation (US) leads to better organization of zeolite nanoparticles. Among all techniques, manual assembly method lead to the most organized zeolite nanoparticles with full coverage. Although strong agitation (US) also results in organized zeolite entities, it was not found to be a suitable technique for EBL studies. Using the manual assembly method, it was possible to form monolayers of zeolite nanoparticles on SiO2 and to make patterns of zeolite nanoparticles by EBL, which offers a simple technique to engineer the surfaces for immobilization of biomolecules.
INTRODUCTION The development of new fabrication methods of organized nanoparticles on surfaces is important for electronic, optoelectronic, biological, and sensing applications. Usually chemical modification of SiO2 substrates with silanization techniques are used for potential biosensor and electronic applications where the targeted biological components are assembled onto modified substrates. By combining silanization methods with microfabrication technology, surfaces can be patterned with functional groups, making it possible to attach cellular structures such as microtubules or cells in specific locations [1]. However, there is great interest in alternative techniques, which enables the immobilization of such components onto silicon substrates for future device applications. More importantly, the method chosen should lead to well organized nanoparticles with full coverage. In order to use nanoparticles for device technologies, uniform distribution of nanoparticles on patterned surfaces with precise control of their organization and density is crucial. In such components, there is a great need to increase the sensitivity level of the fabricated device, and one way to achieve this can be done via further assembly of nanoparticles on the modified substrates which show promising characteristics for the immobilizatio
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