Deposition Processes
W.R. Grove was the first to study what came to be known as “sputtering” (and sputter deposition) in 1852 [35], although others had probably previously noted the effect while studying glow discharges. Grove sputtered from the tip of a wire held close to a
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Donald M. Mattox Management Plus, Inc. Albuquerque, New Mexico
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Copyright © 2003 Springer-Verlag Berlin Heidelberg Originally published by Noyes Publications I William Andrew, Inc. in 2003
All rights reserved. No part of this book may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying, recording, or by any information storage and retrieval system, without permission in writing from the Publisher. Cover Art © 2003 by Brent Beckley I William Andrew, Inc. Library of Congress Catalog Card Number: 2003004260 ISBN 978-3-540-20410-7 Manufactured in the United States of America. Co-published by: springeronline.com
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ISBN 978-3-540-20410-7
Library of Congress Cataloging-in-Publication Data Mattox, D. M. The foundations of vacuum coating technology I Donald M. Mattox. p. em. ISBN 978-3-540-20410-7 ISBN 978-3-662-10329-6 (eBook) DOI 10.1007/978-3-662-10329-6
1. Vacuum metallurgy--Congresses. 2. Metal coating--Congresses. I. Title.
TN686.5.V3M38 669' .028'4--dc21
2003 2003004260
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®fldication The author would like to dedicate this book to his wife, Vivienne, without whose support and encouragement this book would not have been written. He would also like to dedicate the book to his granddaughter, Lindsey, with the hope that when she grows up she will study the history of those subjects that are of interest to her.
Ticknowt~dgm~nts The author assumes responsibility for all errors of commission and omission and would like to encourage comments, corrections, and additions to be sent to [email protected]. The author would like to acknowledge Collin Alexander for providing material from the "proceedings" of the 1943 U.S. Army-sponsored conference on "Application of Metallic Fluoride Reflection Reducing Films to Optical Elements"-the text of which may be found on the SVC Web Site at www.svc.org; Ric Shimshock for the re
