Design and Optimization of High-Performance Through Hole Based MEMS Energy Harvester Using PiezoMUMPs
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https://doi.org/10.1007/s11664-020-08528-6 Ó 2020 The Minerals, Metals & Materials Society
Design and Optimization of High-Performance Through Hole Based MEMS Energy Harvester Using PiezoMUMPs PRIYABRATA BISWAL ,1,3 SOUGATA KUMAR KAR,1,4 and BANIBRATA MUKHERJEE2,5 1.—Department of ECE, NIT Rourkela, Rourkela 769008, India. 2.—Advanced Technology Development Centre, IIT Kharagpur, Kharagpur 721302, India. 3.—e-mail: [email protected]. 4.—e-mail: [email protected]. 5.—e-mail: [email protected]
Piezoelectric energy harvesting is an emerging area of research to meet the demand of nonconventional energy sources. In this paper, we have designed and analysed high-performance micro-electromechanical system (MEMS) piezoelectric energy harvesters by incorporating a through-hole in the classical cantilever configuration. The harvesters are designed using piezoelectric multi-user MEMS processes (PiezoMUMPs), where aluminum nitride (AlN) piezoelectric material is chosen on silicon substrate. A unique optimization method is applied to deduce a critical ratio of hole length to cantilever length as 0.2–0.26 for structures that are not tip mass-based and 0.4–0.5 for tip massbased structures to achieve maximum power harvesting capability. The performance of the proposed harvesters is observed to be superior in comparison to that reported in the literature in terms of improved voltage and power harvesting capability and less area requirement. The classical cantilever topology with unoptimized and optimized holes produces power of 423 nW with normalized power density (NPD) of 12.78 lW/mm3 =g2 and 490 nW with NPD of 14:95lW=mm3 =g2 , respectively, at load resistance of 1 MX with application of 1 g acceleration. Furthermore, a comprehensive analysis of PiezoMUMPs design guidelines for designing hole-based harvesters is presented, and a layout of the harvesters to be fabricated is also provided. Key words: MEMS, rectangular hole effect, piezoelectric energy harvester, optimization, PiezoMUMPs
INTRODUCTION Micro-electromechanical system (MEMS) sensors and actuators have played a significant role in various industries or research areas, such as robotics, wireless sensor nodes, smart building and bridge health monitoring, as well as in biomedical applications. In recent decades, due to advanced complementary metal oxide semiconductor (CMOS) or MEMS fabrication processes, miniaturized devices have replaced bulky, low-response, space-
(Received July 15, 2020; accepted September 25, 2020)
consuming, low-accuracy sensors or actuators. With the increasing demand of modern-era requirements for low-power sensors, researchers are continually exploring every aspect of sensors, from the physical dimensions to the working operations. Different sensors including inertial sensors, vibration sensors and pressure sensors can be used as MEMS sensors, and they are widely deployed in wireless sensor nodes or structural health monitoring. Those sensors deployed in different nodes require an external power supply to operate at a desire
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