Detectors in Thin Crystalline Silicon Films

Photodiodes in thin Silicon-on-Insulator (SOI) films represent a possibility to avoid slow carrier diffusion for achieving high-speed operation. CMOS circuits in Silicon-on-Sapphire (SOS) thin films allow easy hybrid integration of III/V laser diodes, sin

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advanced microelectronics

Springer-Verlag Berlin Heidelberg GmbH

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Springer Series in

advanced microelectronics Series Editors: K. Itoh T. Lee T. Sakurai W. M. C. Sansen

D. Schmitt-Landsiedel

The Springer Series in Advanced Microelectronics provides systematic information on all the topics relevant for the design, processing, and manufacturing of microelectronic devices. The books, each prepared by leading researchers or engineers in their f ields, cover the basic and advanced aspects of topics such as wafer processing, materials, device design, device technologies, circuit design, VLSI implementation, and subsystem technology. The series forms a bridge between physics and engineering and the volumes will appeal to practicing engineers as well as research scientists. 1

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Cellular Neural Networks Chaos, Complexity and VLSI Processing By G. Manganaro, P. Arena, and L. Fortuna Technology of Integrated Circuits By D. Widmann, H. Mader, and H. Friedrich Ferroelectric Memories By J.F. Scott Microwave Resonators and Filters for Wireless Communication Theory, Design and Application By M. Makimoto and S. Yamashita VLSI Memory Chip Design By K. Itoh Smart Power ICs Technologies and Applications Ed. by B. Murari, R. Bertotti, and G.A. Vignola Noise in Semiconductor Devices Modeling and Simulation By F. Bonani and G. Ghione Logic Synthesis for Asynchronous Controllers and Interfaces By J. Cortadella, M. Kishinevsky, A. Kondratyev, L. Lavagno, and A. Yakovlev

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Low Dielectric Constant Materials for IC Applications Editors: P.S. Ho, J. Leu, W.W. Lee Lock-in Thermography Basics and Use for Functional Diagnostics of Electronic Components By O. Breitenstein and M. Langenkamp High-Frequency Bipolar Transistors Physics, Modelling, Applications By M. Reisch Current Sense Amplifiers for Embedded SRAM in High-Performance System-on-a-Chip Designs By B. Wicht Silicon Optoelectronic Integrated Circuits By H. Zimmermann

Horst Zimmermann

Silicon Optoelectronic Integrated Circuits With 291 Figures and 19 Tables

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Professor Dr.-Ing. Horst Zimmermann Institut f¨ur Elektrische Mess- und Schaltungstechnik Technische Universit¨at Wien Gusshausstraße 25/354, 1040 Wien Austria E-mail: [email protected]

Series Editors:

Dr. Kiyoo Itoh Hitachi Ltd., Central Research Laboratory, 1-280 Higashi-Koigakubo Kokubunji-shi, Tokyo 185-8601, Japan

Professor Thomas Lee Stanford University, Department of Electrical Engineering, 420 Via Palou Mall, CIS-205 Stanford, CA 94305-4070, USA

Professor Takayasu Sakurai Center for Collaborative Research, University of Tokyo, 7-22-1 Roppongi Minato-ku, Tokyo 106-8558, Japan

Professor Willy M. C. Sansen Katholieke Universiteit Leuven, ESAT-MICAS, Kasteelpark Arenberg 10 3001 Leuven, Belgium

Professor Doris Schmitt-Landsiedel Technische Universit¨at M¨unchen, Lehrstuhl f¨ur Technische Elektronik Theresienstraße 90, Geb¨aude N3, 80290 München, Germany

ISSN 1437-0387 ISBN 978-3-642-07351-9 Library of Congress Cataloging-in-Publication Data: Zimmermann, Horst, 1957-

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