Determination of the Elastic and Plastic Properties of Transversely Isotropic Thin Films on Substrates by Sharp Indentat

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MRS Advances © 2018 Materials Research Society DOI: 10.1557/adv.2018.79

Determination of the Elastic and Plastic Properties of Transversely Isotropic Thin Films on Substrates by Sharp Indentation Zheng Zhi1, T. A. Venkatesh1 1

Department of Materials Science and Chemical Engineering, Stony Brook University, NY 11794

ABSTRACT A combination of dimensional analysis and finite element modeling was invoked to characterize the indentation behavior of transversely isotropic thin films on substrate materials. Through indentation simulations of over 13,500 combinations of properties for the thin film system, functional relationships that connect the indentation responses of the thin films with the elastic and plastic properties of the thin films were obtained. The forward algorithms that predict the indentation response characteristics from known material properties and the reverse algorithms that predict the material properties from known indentation responses were verified to be very accurate. Thus, the viability of using the indentation method to determine the elastic and plastic properties of transversely isotropic thin films on substrate materials was demonstrated. INTRODUCTION The instrumented indentation method, derived from traditional hardness testing methods, has emerged as a novel, convenient and accurate technique for assessing a wide variety of mechanical and coupled properties of bulk and thin film materials [1-4]. Within the context of developing a comprehensive methodology for determining the elastic and plastic properties of indented materials from measured indentation responses, considerable progress has been made in the fields of bulk isotropic materials [4,5], thin film isotropic materials [6] and bulk transversely isotropic materials [7]. However, a method to determine the properties of transversely isotropic thin films on substrates has not yet been developed. As many thin films and coatings exhibit transversely isotropic behavior due to their fabrication process and the resulting microstructures, an indentation-based method to characterize the properties of such materials would be very useful [8-10]. Hence, the objectives of the present study are: (i) to develop finite element based numerical models to capture the indentation response of transversely isotropic thin films on substrates and (ii) to invoke a combination of dimensional analysis and finite element analysis to capture the relationships between the elastic and plastic properties of the thin films and their indentation responses. BACKGROUND

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The instrumented indentation based methods of property extraction involve indenting a material with an indenter and observing the complete force – depth relationship during the loading and the unloading process (Figure 1). One of the main objectives of the instru