Development of Large Array of Kinetic Inductance Detectors Using Commercial-Class External Foundries
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Development of Large Array of Kinetic Inductance Detectors Using Commercial‑Class External Foundries K. Kiuchi1 · S. Oguri2 · S. Mima2 · C. Otani2,4 · A. Kusaka1,3,5 Received: 2 September 2019 / Accepted: 21 March 2020 © Springer Science+Business Media, LLC, part of Springer Nature 2020
Abstract This study focuses on kinetic inductance detectors (KIDs) fabricated in external foundries using 6 and 8-inch processes. These processes allow us to fabricate large arrays of KIDs in a scalable manner. The support of such a wide variety of astronomical and particle-physics applications requires large numbers of superconducting detectors. For example, the sensitivity of the cosmic microwave background measurements has exponentially improved over the past few decades. The most significant advantage of KIDs is scalability to a large array due to the intrinsic frequency multiplexing scheme. The first step of fabricating a large array of KIDs is designing test chips to check the performance of the 6 and 8-inch micro-electro-mechanical system processes. The KIDs are made of a single pure aluminum film and consist of coplanar waveguide quarter wavelength resonators with a feedline. Each wafer is filled with 32 chips, where the chip size is 20 × 20 mm2, with 48 resonators on each chip. The chips are evaluated using a dilution refrigerator at temperatures ranging from 100 to 500 mK. The quality factor of the resonators, temperature dependency of the resonance frequency, and yields are comparable with those of the KIDs fabricated in a dedicated clean room for superconducting detectors. Keywords Kinetic inductance detectors (KIDs) · Fabrication
* K. Kiuchi [email protected]‑tokyo.ac.jp 1
Department of Physics, The university of Tokyo, Tokyo 113‑0033, Japan
2
Center for Advanced Photonics, RIKEN, Saitama 351‑0198, Japan
3
Physics Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
4
Research Center for the Early Universe, School of Science, The University of Tokyo, Tokyo 113‑0033, Japan
5
Kavli Institute for the Physics and Mathematics of the Universe (Kavli IPMU, WPI), Berkeley Satellite, The University of California, Berkeley 94720, USA
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Journal of Low Temperature Physics
1 Introduction Superconducting detectors are widely used for astronomical observations, especially CMB observation. The sensitivity of current superconducting detectors reaches the photon noise limit in ground-based experiments; thus, sensitivity can be exponentially improved by increasing the number of detectors. The latest CMB detector array is fabricated on a 6-inch wafer, each of which has ~1000 sensors [1, 2]. The next-generation experiments, CMB-S4, require a total of 500,000 sensors [3]. Kinetic inductance detectors (KIDs) are a promising technology for developing a large array of detectors. Electrons in a superconductor create Cooper pairs, and there is an energy gap between the energy states of Cooper pairs and normal states. Cooper pairs, in turn, create kinetic inductance due to their inerti
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