Device Applications of Silicon Nanocrystals and Nanostructures

Recent developments in the technology of silicon nanocrystals and silicon nanostructures, where quantum-size effects are important, are systematically described including examples of device applications. Due to the strong quantum confinement effect, the m

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Nanostructure Science and Technology Series Editor: David J. Lockwood, FRSC National Research Council of Canada Ottawa, Ontario, Canada

For other titles published in this series, go to www.springer.com/series/6331

Nobuyoshi Koshida Editor

Device Applications of Silicon Nanocrystals and Nanostructures

Editor Nobuyoshi Koshida Department of Electrical & Electronic Engineering Tokyo University of Agriculture and Technology Tokyo, Japan

ISBN: 978-0-387-78688-9 e-ISBN: 978-0-387-78689-6 DOI: 10.1007/978-0-387-78689-6 Library of Congress Control Number: 2008940837 © Springer Science+Business Media, LLC 2009 All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. Printed on acid-free paper springer.com

Foreword

Silicon: Different people associate the word with different things. The general public will often correctly link it to electronics and sometimes confuse it with the compound that seals their bath or enlarges particular body parts. As scientists or technologists, we know the elemental semiconducting version to be one of, if not, the most studied materials known. But when we sculpt solid silicon structures below 10 nm, a variety of dramatic and often astonishing effects ensue. Indeed, this book on nanostructured silicon devices brings together two of the great endeavours of our generation. There has already been huge investment and human ingenuity in the pervasive silicon device – the integrated circuit. There is now also mounting excitement and investment in nanotechnology – our ability to design, fabricate, and use techniques and materials at the nanoscale. The book’s editor, Professor Nobuyoshi Koshida, is undoubtedly a great pioneer in this field, with more than 30 years of world-leading research on novel phenomena, characterization, and uses of nanoscale silicon. He has assembled a great team of authors, all established experts in their respective areas of specialization. The content of this book show a bias toward electronic chip-based uses of “nano-silicon” (Chaps. 5–8), and rightly so. Indeed many would argue that we are only interested in silicon nanostructures because of what the bulk material has achieved with its integrated circuits inside everyone’s PC, and what we hope MEMS technology might achieve. Nonetheless, within the book, one also will find significant progress toward using nano-silicon in scientific fields that might not be