Diamond-Like Carbon Film Deposition on an Artificial Heart Blood Pump Using a Flexible Type Electrode with r.f. Plasma C
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0956-J09-25
Diamond-Like Carbon Film Deposition on an Artificial Heart Blood Pump Using a Flexible Type Electrode with r.f. Plasma CVD Processing Kazuya Kanasugi1, Yasuharu Ohgoe1, Katsuya Tsuchimoto2, Keisuke Sato1, Kenji K. Hirakuri1, Osamu Miyashita1, Akio Funakubo1, and Yasuhiro Fukui1 1 Tokyo Denki University, Hatoyama, Saitama, 350-0394, Japan 2 Aisin Cosmos R&D Co. Ltd., 5-50, Hachiken-cho, Kariya, Aichi, 448-8650, Japan
ABSTRACT Diamond-like carbon (DLC) film was deposited uniformly on an irregular structure such as a polyurethane artificial heart blood pump using a special 3-dimensional type electrode. Process of applying the DLC film coating is accomplished by inserting a large number of small metallic balls (φ0.8 mm chromium balls). It is then possible to adjust the shape of the electrode in such a way that the DLC film coating can be applied to the irregular surface of the artificial heart. In investigating the availability of the electrode, under helium (He) plasma, the plasma states were measured using double probe analysis. Lateral profiles of the electron temperature were higher in the centre and decreased towards the edges of the electrode. On the other hand, the plasma density profiles were lower in the centre part than at the edges. The electrode kept ion sheath on the artificial heart blood pump’s surface at self-bias voltage uniformly. The results were that the DLC film was deposited completely on the artificial heart blood pump at the film thickness of approximately 350 - 380 nm. Additionally the film structure was uniform. INTRODUCTION Diamond-like carbon (DLC) films are considerably interesting in a variety of applications, due to their attractive electrical, mechanical, and chemical properties [1-4]. The combination of these properties makes many applications for wear-resistant surfaces, corrosion protection, and heat transfer layers in electronic devices [3,5,6]. Additionally, radio frequency (r.f.) plasma chemical vapor deposition (CVD) technique is very useful for DLC films deposition on most substrates that are conductor and/or insulator substrates at low temperatures [6,7]. Therefore DLC films have been applied to polymeric materials such as biomedical devices including artificial hearts, stents, and so on. A large number of reports have suggested biomedical applications of a-C:H films including DLC films[8]. However, it is difficult to deposit on 3dimensional structures using common r.f. plasma CVD technique. In our previous work, we succeeded in DLC films deposition on simple 3-dimensional structures, the DLC films were deposited uniformly on a hemispheric polyurethane structure and a polycarbonate-tube inner wall using the hemispheric and the cylindrical type electrode under r.f. plasma, respectively [912]. In this method, it is a requirement that these electrodes should be placed on the reverse side of the film deposition surface side. Hence, in the case of DLC film deposition on structure with an irregular surface such as an artificial heart blood pump, it is difficult to deposit
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