Digital Transformation in Semiconductor Manufacturing Proceedings of
This open access book reports on cutting-edge electrical engineering and microelectronics solutions to foster and support digitalization in the semiconductor industry. Based on the outcomes of the European project iDev40, which were presented at the two f
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Sophia Keil Rainer Lasch Fabian Lindner Jacob Lohmer Editors
Digital Transformation in Semiconductor Manufacturing Proceedings of the 1st and 2nd European Advances in Digital Transformation Conference, EADTC 2018, Zittau, Germany and EADTC 2019, Milan, Italy
Lecture Notes in Electrical Engineering Volume 670
Series Editors Leopoldo Angrisani, Department of Electrical and Information Technologies Engineering, University of Napoli Federico II, Naples, Italy Marco Arteaga, Departament de Control y Robótica, Universidad Nacional Autónoma de México, Coyoacán, Mexico Bijaya Ketan Panigrahi, Electrical Engineering, Indian Institute of Technology Delhi, New Delhi, Delhi, India Samarjit Chakraborty, Fakultät für Elektrotechnik und Informationstechnik, TU München, Munich, Germany Jiming Chen, Zhejiang University, Hangzhou, Zhejiang, China Shanben Chen, Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai, China Tan Kay Chen, Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore Rüdiger Dillmann, Humanoids and Intelligent Systems Laboratory, Karlsruhe Institute for Technology, Karlsruhe, Germany Haibin Duan, Beijing University of Aeronautics and Astronautics, Beijing, China Gianluigi Ferrari, Università di Parma, Parma, Italy Manuel Ferre, Centre for Automation and Robotics CAR (UPM-CSIC), Universidad Politécnica de Madrid, Madrid, Spain Sandra Hirche, Department of Electrical Engineering and Information Science, Technische Universität München, Munich, Germany Faryar Jabbari, Department of Mechanical and Aerospace Engineering, University of California, Irvine, CA, USA Limin Jia, State Key Laboratory of Rail Traffic Control and Safety, Beijing Jiaotong University, Beijing, China Janusz Kacprzyk, Systems Research Institute, Polish Academy of Sciences, Warsaw, Poland Alaa Khamis, German University in Egypt El Tagamoa El Khames, New Cairo City, Egypt Torsten Kroeger, Stanford University, Stanford, CA, USA Qilian Liang, Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA Ferran Martín, Departament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, Bellaterra, Barcelona, Spain Tan Cher Ming, College of Engineering, Nanyang Technological University, Singapore, Singapore Wolfgang Minker, Institute of Information Technology, University of Ulm, Ulm, Germany Pradeep Misra, Department of Electrical Engineering, Wright State University, Dayton, OH, USA Sebastian Möller, Quality and Usability Lab, TU Berlin, Berlin, Germany Subhas Mukhopadhyay, School of Engineering & Advanced Technology, Massey University, Palmerston North, Manawatu-Wanganui, New Zealand Cun-Zheng Ning, Electrical Engineering, Arizona State University, Tempe, AZ, USA Toyoaki Nishida, Graduate School of Informatics, Kyoto University, Kyoto, Japan Federica Pascucci, Dipartimento di Ingegneria, Università degli Studi “Roma Tre”, Rome, Italy Yong Qin, State Key Laboratory of Rail Traffic Control and Safety, Beijing Jiaotong University, Beijing, Chin
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