Effect of Crystal Orientation on Microwear of Si Single Crystal and The Wear Structure
- PDF / 814,879 Bytes
- 6 Pages / 612 x 792 pts (letter) Page_size
- 114 Downloads / 271 Views
Y8.34.1
Effect of Crystal Orientation on Microwear of Si Single Crystal and The Wear Structure M.Takagi, N.Arima1, H.Iwata2, T.Imura, K.Sasaki3 and H.Saka3 Department of Mechanical Engineering, Aichi Institute of Technology, Toyota 470-0392, Japan 1 Graduate School, Aichi Institute of Technology, Toyota 470-0392, Japan 2 Research Institute for Industrial Technology, Aichi Institute of Technology, Toyota 470-0392, Japan 3 Department of Quantum Engineering, Nagoya University, Nagoya 464-8603, Japan ABSTRACT Microtribology of Silicon single crystals is one of the important factors for the practical use of MEMS. In this study, the effect of crystal orientation on microwear of Silicon single crystal and the wear structure were mainly investigated. Microfriction experiments using atomic force / friction force microscope (AFM / FFM) were carried out to investigate the effect of crystal orientation on the microwear depth of Silicon single crystals. In these experiments, the scanning-scratching directions of a tip of AFM / FFM were and on Si(100) surface and on Si(111) surface. As a result, it was found that the depth of the wear marks generated on Silicon surfaces increased in the following order: , , . Cross-sectional TEM observations of the microwear marks were carried out. As a result, it was found that the small dislocation loops were generated in the surface region at the first stage of the microwear, and the size and the number of dislocations increased with the progress of the microwear. INTRODUCTION
Many researches and developments on MEMS (Microelectromechanical systems) have been carried out in recent years. Microtribology is one of the key technologies for the practical use of MEMS. The developments of scanning-probe microscope (SPM), especially, atomic force microscope (AFM), provided the new approaches for the studies on microtribology. A lot of investigations on microtribological properties of various materials including hard thin films using these microscopes have been conducted since around 1990 [1-4]. Among these investigations, a few reports on the effects of crystal orientation and grain boundary on the microfrictional properties have been published [5]. However, no many reports on the effect of crystal orientation to microwear properties and on the microwear structures have been available so far. In the present study, the effect of crystal orientation on microwear properties of Silicon (Si) single crystal and the microwear structures were mainly investigated. In order to study the microwear structures which were expected to result in the clarification of mechanism of microwear, cross-sectional TEM observations of the microwear marks generated by microwear tests using AFM were carried out.
Y8.34.2
EXPERIMENTAL DETAILS Microwear properties of Si single crystals were studied by the scanning-scratch tests using AFM. In these microwear tests, two kinds of tips made of diamond and Si3N4 were used to generate the normal force of 100-200 and 1-5 N, respectively. The testing area, 5 m 5 m in size, was sc
Data Loading...
