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Effect of lattice mismatch on the epitaxy of sol-gel LiNbO3 thin films T. A. Derouin, C. D. E. Lakeman, X. H. Wu, J. S. Speck, and F. F. Lange Materials Department and Materials Research Laboratory, University of California, Santa Barbara, California 93106 (Received 12 February 1996; accepted 13 September 1996)

A solution precursor method based on metal alkoxides was used to produce epitaxial LiNbO3 thin films, ø200 nm thick, on (0001) sapphire substrates. Transmission electron microscopy revealed that the major cause of surface roughness in these films was grain boundary grooves between mosaic grains with misorientations

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