Electrical Characteristics of Capacitive Coupled Radio Frequency Discharges in Argon and Hydrogen
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Electrical Characteristics of Capacitive Coupled Radio Frequency Discharges in Argon and Hydrogen1 Murat Tanışlıa,*, Neslihan Şahina, Süleyman Demira, and Sercan Mertadama a
Anadolu University, Science Faculty, Department of Physics, Yunusemre Campus, Eskişehir, 26470 Turkey *e-mail: [email protected] Received April 24, 2018; revised September 23, 2018; accepted October 25, 2018
Abstract—A symmetric radio frequency (RF) (13.56 MHz) electrode discharge system with different geometry has been investigated at low pressure. All electrical properties of symmetric capacitive RF discharge in pure argon (Ar) and pure hydrogen (H2) have been obtained from the current and voltage waveforms. Here, the changes of voltage and current were investigated according to external electrical discharge parameters. The electron densities of these discharges were measured with a single Langmuir probe. A homogeneous model of capacitive coupled RF (CCRF) discharge was used to determine the electrical properties of a parallel-plate RF discharge system and their dependences on the input RF power and gas pressure. DOI: 10.1134/S1063780X19040081
1. INTRODUCTION Nonlocal equilibrium discharges have been used in the increasing number of industrial applications. Some of applications are the etching of semiconductors with plasma, deposition of ions on thin films, plasma cleaning, etc. Therefore, the behaviors of discharges have been investigated in order to facilitate their applications. The use of capacitive coupled RF (CCRF) discharges in technological productions has led to increased studies on these discharges [1]. CCRF discharge can be formed between the two electrodes. The RF voltage is usually applied to one of these electrodes, while the other electrode is connected to the ground. Most of the applied voltage usually occurs in the border region between quasineutral discharge and the electrode. This region is called the sheath. Ions inside of the sheath are accelerated toward the electrode. Discharge is almost neutral and creates an environment consisting of the charged particles freely moving in random directions [2, 3]. The part between the boundaries of the structure formed the plasma and plasma region is named the plasma sheath. In this region, the acceleration of the ions become less. This structure is positively charged. The sheath layer has its own potential and resistance [4]. The new methods for formation and the parameters and new features of discharge have been developed in the studies. One of the plasma production method is CCRF discharge system at low-pressure. This method have been used in this study, the electrical properties of the plasma have been observed by differ1 The article is published in the original.
ent methods, and the results have been evaluated. In this study, CCRF discharges have been created independently with hydrogen and argon gases, and then their electrical properties have been compared via oscilloscope measurements and Langmuir probe. The electric potential of plasma is also one of
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