Electrosynthesis of Magnetostrictive Nanosensor Array
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Electrosynthesis of Magnetostrictive Nanosensor Array Suiqiong Li, Lisa Orona, Liling Fu, and Z.-Y. Cheng Materials Research and Education Center, Auburn University, Auburn, AL 36849, U.S.A. ABSTRACT Magnetostrictive nanobars as sensor platform were induced. Based on the resonance behavior of strips made from thin films, it is identified that the amorphous Fe-B alloy is a good candidate for fabricating high performance sensor platform. The fabrication process of amorphous Fe-B nanobars using electrochemical deposition is reported. The magnetization hysteresis loop of Fe-B nanobars with the diameters of 50, 100 and 200 nm, respectively, was characterized. It is found that, for all nanobars, the coercive field measured along length direction is smaller than the coercive field measured perpendicular to length direction. The physics behind the phenomena is discussed. INTRODUCTION As an important type of sensor platforms, acoustic wave (AW) devices have been attracting considerable attentions due to the fact that the AW devices provide a high sensitivity with a real-time detection capability [1-4]. In most of these applications, the AW devices actually serve as a mass detector. That is, AW devices are operated based on the principle that the resonance frequency shifts with the mass load attached on the device. Therefore, there are two critical parameters, mass sensitivity (Sm) and quality merit factor (Q value), for AW devices. The Sm expresses the shift in resonance frequency of AW device with a unit mass load, while the Q value defines the sharpness of the resonance peak. A higher Sm means a larger shift in the resonance frequency, while a larger Q value means a sharper resonance peak. A sharper resonance peak results in a higher resolution in determining resonance frequency. Therefore, an AW device with a higher Sm and a higher Q value is highly desirable for developing high performance sensors. For developing biosensors, it is also very critical for the AW device to be operated in liquid media, such as water. The comparison of different AW devices can be found in a few reviewing articles [1-4]. It is indicated that the MEMS-based devices, such as microcantilevers, have a much higher Sm than bulk devices, such as Quartz microbalance. For example, the detection of one single bacterium cell using microcantilever has been demonstrated [4]. Currently, most of AW devices are based on silicon and piezoelectric materials. The advantage of using silicon is that the microfabrication process of silicon is well established. The advantage of using piezoelectric materials is that the actuating and sensing of AW device are easy. Recently, the magnetostrictive materials have been introduced as an alternate material for developing high performance sensor platform [5-7]. For example, similar to the piezoelectric cantilevers, the magnetostrictive cantilevers are easy to actuate and sense. More importantly, the magnetostrictive cantilevers work well in liquid due to the high Q value [7]. In this paper, a new type of AW de
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