Ellipsometric Porosimetry of Porous Low-k Films with Quazi-Closed Cavities
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Ellipsometric Porosimetry of Porous Low-k Films with Quazi-Closed Cavities. Mikhail R.Baklanov, Konstantin P.Mogilnikov1, Jin-Heong Yim2 IMEC, Kapeldreef 75, B-3001 Leuven, Belgium 1 SOPRA, Bois Colombes, France 2 Samsung Advanced Institute of Technology (SAIT), Kyungki-do, South Korea ABSTRACT Evaluation of quasi-closed cavities connected with air through narrow necks is discussed. These cavities behave as closed pores when they are studied by Positron Annihilation Lifetime Spectroscopy (PALS). The reason is a short lifetime of o-positronium (Ps) and energy barrier that exist for Ps diffusion from large pores (d>3 nm) to small ones (d
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