Excimer Laser Applications: Polymer Etching and Metal Deposition
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EXCIMER LASER APPLICATIONS: POLYMER ETCHING AND METAL DEPOSITION MICHAEL RITZ, V. SRINIVASAN*, S. V. BABU, and RAMESH C. PATEL** Department of Chemical Engineering, Clarkson University, Potsdam, NY 13676 *presently at IBM Corporation, Austin, TX **Department of Chemistry, Clarkson University, Potsdam, NY 13676 ABSTRACT polyimide and Excimer laser induced ablative decomposition of 2 It is poly(methylmethacrylate) at high fluences (> 1 J/cm ) is discussed. shown that 0.4 pm sized features can be imaged in polyimide using ArF laser pulses. Preliminary results from experiments in which copper particles ( 1 J/cm2 ) both photochemical and photothermal processes contribute to the ablative photodecomposition of several polymers like polyimide and poly(methlymethacrylate). Feature sizes as small as 0.4 Um have been created in polyimide in a self-developing manner.
Almost
perfectly spherical particles of copper less than one micrometer in size have been deposited on glass substrates by exposing thin films of a copper formate/glycerol paste to KrF laser radiation. The adhesion of these particles to the substrate is excellent. ACKNOWLEDGMENTS This work has been supported in part by NSF grants CBT-8507068 and ECS-
8611298. The authors would like to thank S. Chandrasekhar for help with the SEM photographs of the copper deposits.
I Fig. 4.
'C.
Photograph of a copper deposit at 750X.
The dark areas are voids.
439
--,H-.lpm Fig. 5.
SEM of a copper deposit taken at 5500X.
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