Fabrication of microstructures with mirror surfaces by wire electrochemical micromachining of stainless steel 304 using
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ORIGINAL ARTICLE
Fabrication of microstructures with mirror surfaces by wire electrochemical micromachining of stainless steel 304 using NaNO3-ethylene glycol Ningsong Qu 1,2 & Chuanping Gao 1 Received: 31 August 2020 / Accepted: 9 November 2020 # Springer-Verlag London Ltd., part of Springer Nature 2020
Abstract Microstructures with superior surface quality have been becoming more and more important in many fields. Various methods have been exploited to fabricate high quality microstructures. Among those approaches, wire electrochemical micromachining (WEMM) is an effective and efficient way to manufacture micro components. Generating passive film on the workpiece is an alternative to improve surface quality in WEMM, which necessitates a delicate selection of electrolyte. NaNO3 solution as a passive electrolyte is beneficial to obtain good surface quality, but it barely takes effect in WEMM. Herein, an attempt is made to combine ethylene glycol (solvent) and NaNO3 (solute) to investigate its influences on surface quality in WEMM of stainless steel (304 SS). Electrochemical measurements reveal that 304 SS is subjected to secondary passivation in 1 mol/L NaNO3-ethylene glycol. X-ray photoelectron spectroscopy analysis indicates that the compositions of the passive films formed at various potentials are not exactly the same. Both the secondary passivation and the passive films make dramatic contributions to the improvement of the machined surface quality. Experimental results demonstrate that surface roughness achieved with ethylene glycol is Ra = 0.034 μm, noticeably smaller than that with traditional acid solutions. Finally, microstructures with ultra-smooth surfaces are fabricated on the 304 SS plate. Keywords Wire electrochemical micromachining . Surface quality . Stainless steel 304 . Ethylene glycol
1 Introduction In recent years, microstructures have been gaining more and more applications in various fields such as aerospace, automotive, defense industry, microelectromechanical systems, biomedical sensors, and communications [1–4], because of the expanding demands for multifunctionality integration and structure down-sizing. The miniaturization of components benefits the world in different aspects. The micromachined sensors for automotive applications are expected to ensure the safety and comfort of customers [5]. With lower fabrication cost, the fabrication of microfilters promising for
* Ningsong Qu [email protected] 1
Nanjing University of Aeronautics and Astronautics, Nanjing 210016, People’s Republic of China
2
Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing 210016, China
environmental applications can be realized [6]. Newly, microdevices have been reported to be potential oral drug delivery vehicles to both reduce the loss of the drug and improve the absorption efficiency [7, 8], which is significantly good for human society. Due to the increasing miniaturization trend across various industries, many fabrication techniques have been exploited. Aluminum alloy microro
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