Fabrication of silicon carbide microchannels by thin diamond wheel grinding
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ORIGINAL ARTICLE
Fabrication of silicon carbide microchannels by thin diamond wheel grinding Yanlin Xie 1 & Daxiang Deng 2 & Guang Pi 3 & Xiang Huang 4 & Chenyang Zhao 2 Received: 25 May 2020 / Accepted: 14 September 2020 / Published online: 26 September 2020 # Springer-Verlag London Ltd., part of Springer Nature 2020
Abstract Silicon carbide (SiC) microchannels are attractive for their wide applications in microsensors, MOS devices, UV photodiodes, microcatalytic reactors, and microchannel heat exchangers in harsh environments. However, the machining of SiC microchannels poses many challenges because of the difficulty and cost involved in the material removal process due to the high hardness and brittleness of SiC ceramic. In the present study, we developed a thin diamond wheel grinding process to fabricate SiC microchannels in a conventional vertical milling machine. Microchannels with trapezoidal shapes were successfully processed in SiC substrates by thin diamond wheels. The formation, geometric dimensions, and surface quality of SiC microchannels were studied together with the analysis of material removal mechanism. The effects of grinding processing parameters, i.e., wheel speed, feed speed, grinding depth, and grinding tool parameters including grit size and thickness of diamond grinding wheel, on the geometric dimension and surface morphology were comprehensively explored. The top width of microchannels first increased and then decreased with the increase in wheel speed, whereas a reverse tendency was observed with increasing grinding depth, feed speed, and grit size. The surface roughness decreased continuously with increasing wheel speed, but it tended to increase with the increase in feed speed generally. The variations in geometric dimensions and surface roughness of SiC microchannels can be related to the crack or fracture propagations and material removal mechanism during the thin diamond wheel grinding process. Besides, the influential significance of the above processing and grinding tool parameters were also evaluated by analysis of variance (ANOVA). Keywords Silicon carbide . Microchannels . Thin diamond wheel grinding
1 Introduction Microchannels, as an integral component of micro-coolers, micro-biochips, micro-reactors, and micro-fuel cells, have been widely utilized in many areas, e.g., energy, defense, microelectronics, and medical sectors [1, 2]. Microchannels are one of the essential elements to transport fluid within a * Daxiang Deng [email protected] 1
Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong
2
School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen 518055, China
3
Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China
4
School of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310014, China
miniature area, and they feature many promising advantages, such as compact dimensions, lightweight, large surface area per given vol
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