Fabrication of Titanium Oxide Film with high crystallinity by the New Electrochemical Techniques

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Fabrication of Titanium Oxide Film with high crystallinity by the New Electrochemical Techniques Hiroki Ishizaki1 and Seishiro Ito2 1 Department of Electronic System Engineering, Tokyo University of Science Suwa, 5000-1 Toyohira, Chino-shi, Nagano 391-0292, Japan 2 Faculty of Science and Engineering, Kinki University, 4-1 Kowakae 3-chome, Higashiosaka, Osaka 577-8502, Japan ABSTRACT TiO2 films with poly crystal were electrodeposited on conductive substrate (NESA glass, approximately 10Ω/□, Asahi glass Co. Ltd.) from the titanium potassium oxalate dehydrate aqueous solution containing hydroxylamine adjusted pH 9 with KOH aq. at 333k. The peak corresponded to Ti3+ion into these TiO2 film was not observed by using X-ray photoelectron spectroscopy (XPS). The photocatalysis of TiO2 film increased with a decrease of cathodic potential. In particular, TiO2 film obtained at cathodic potential of -1.3V, had the higher photocatalysis than that of other potential. INTRODUCTION Recently, titanium oxide films are paid much attention for many applications such as photocatalysis, chemical sensor, ferroelectrical devices, opto-electrical devices and solar cells [1, 2], because of its ferroelectrical, photocatalytic and optical properties. In order to develop the dye-sensitized solar cell devices with high-performance, the photocatalytic property and crystallinity of titanium oxide film need be improved [3, 4]. Thus, we will suggest that titanium oxide film with high crystallinity will be obtained on the conductive substrate at the low temperature by electrochemical techniques. In particular, the electrochemical deposition techniques presents several advantages: (1) relatively uniform film can be obtained on substrates with melting point lower than 373K, (2) the thickness and morphology of films can be controlled by electrochemical parameters, (3) the deposition rate is relatively high, (4) the equipment is not expensive, and (5) the process is less hazardous and environmentally friendly [5]. In this paper, we reported the detail results for the fabrication of poly crystalline titanium oxide films on conductive substrate (NESA glass) from the titanium ion aqueous solution containing a complex agent and a hydroxylamine at pH9 by electrodeposition without the heat treatment. EXPERIMENT The TiO2 film is grown by cathodic potential ranging of -1.0V to -1.3V referred to Ag/AgCl electrode in 0.05 mol/L titanium potassium oxalate dehydrate (K2[TiO(C2O4)2]) aqueous solution containing 0.5mol/L hydroxylamine (NH2OH). The solutions prepared with distilled water and reagent grade chemicals. And then this solution with colorless and transparent was obtained by the adjusting pH9 with KOH aq. The conductive substrate (NESA

glass) is used as the cathode. Prior to deposition, the glass substrate (10x20x1.1mm) was rinsed in acetone and anodically polarized in a 1.0mol/L NaOH aqueous solution and was then active anode. The Pt/Ti sheet (99.99%purity) is used as active anode. The Ag/AgCl electrode in saturated KCl aqueous solution is used as the refe