Feedback Control of MEMS to Atoms
Feedback Control of MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated miniaturized systems. The book is organized according to the dimensional scale of the problem, starting with microscale sys
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Jason J. Gorman • Benjamin Shapiro Editors
Feedback Control of MEMS to Atoms
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Editors Jason J. Gorman National Institute of Standards & Technology (NIST) Intelligent Systems Division 100 Bureau Drive Stop 8230 Gaithersburg MD 20899 USA [email protected]
Benjamin Shapiro University of Maryland 2330 Kim Building College Park MD 20742 USA [email protected]
ISBN 978-1-4419-5831-0 e-ISBN 978-1-4419-5832-7 DOI 10.1007/978-1-4419-5832-7 Springer New York Dordrecht Heidelberg London Library of Congress Control Number: 2011937573 © Springer Science+Business Media, LLC 2012 All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
Preface
This book explores the control of systems on small length scales. Research and development for micro- and nanoscale science and technology has grown quickly over the last decade, particularly in the areas of microelectromechanical systems (MEMS), microfluidics, nanoelectronics, bio-nanotechnologies, nanofabrication, and nanomaterials. However, to date, control theory has played only a small role in the advancement of this research. As we know from the technical progression of macroscale intelligent systems, such as assembly robots and fly-by-wire aircraft, control systems can maximize system performance and, in many cases, enable capabilities that would otherwise not be possible. We expect that control systems will play a similar enabling role in the development of the next generation of microand nanoscale devices, as well as in the precision instrumentation that will be used to fabricate and measure these devices. In support of this, each chapter of this book provides an introduction to an application of micro- and nanotechnologies in which control systems have already been shown to be critical to its success. Through these examples, we aim to provide insight into the unique challenges in controlling systems at small length scales and to highlight the benefits in merging control systems and micro- and nanotechnologies. We conceived of this book because we saw a strong need to bring the control systems and micro- and nanosystems communities closer together. In our view, the intersection between these two groups is still very small, impeding the advancement of active, precise, and robust micro- and nanoscale systems that can mee
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