Femtosecond Laser Direct Writing for 3D Microfluidic Biochip Fabrication
Microfluidic devices with three-dimensional (3D) configurations and multiple functionalities are exceptionally useful for on-chip construction of artificial biological environments and 3D manipulation of bio-species in microscale spaces. Among the current
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Femtosecond Laser Direct Writing for 3D Microfluidic Biochip Fabrication Jian Xu, Felix Sima, and Koji Sugioka
Abstract Microfluidic devices with three-dimensional (3D) configurations and multiple functionalities are exceptionally useful for on-chip construction of artificial biological environments and 3D manipulation of bio-species in microscale spaces. Among the current methods for fabricating these devices, femtosecond (fs) laser direct writing offers several unique advantages, including simple procedures, maskless and resistless processing, and highly flexible 3D fabrication and multifunctional integration in transparent materials such as glass. Direct writing of 3D microstructures having designable functionalities with fs lasers allows the production of microfluidic, microoptic/photonic and microelectronic elements, which can be monolithically integrated into a single glass substrate for the fabrication of high-performance biochips. The principles of fs laser direct writing manufacture of microfluidic, optofluidic, electrofluidic, and ship-in-a-bottle biochips are introduced herein, and practical techniques and recent advances are reviewed. In addition, possible future directions in this field are discussed.
8.1 Introduction Microfluidic biochips allow high-performance manipulation of small volumes of biological liquids in microscale spaces and have led to new possibilities in biological and medical research [1–3]. Devices such as these having three-dimensional (3D) configurations can provide extraordinary flexibility and functionality with regard to the construction of artificial biological microenvironments, such as organs-on-a-chip J. Xu · F. Sima · K. Sugioka (B) RIKEN Center for Advanced Photonics, RIKEN, Wako, Saitama 351-0198, Japan e-mail: [email protected] F. Sima CETAL, National Institute for Lasers, Plasma and Radiation Physics (INFLPR), Magurele, Ilfov 00175, Romania J. Xu School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China © Springer Nature Switzerland AG 2020 A. Hu (ed.), Laser Micro-Nano-Manufacturing and 3D Microprinting, Springer Series in Materials Science 309, https://doi.org/10.1007/978-3-030-59313-1_8
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systems [4–6] and the controllable manipulation of bio-species [7–12]. The use of conventional microfabrication methods based on two-dimensional photolithography to produce microfluidic biochips limits the possible 3D geometric designs and also requires highly complex processes. In contrast, femtosecond (fs) laser microfabrication enables the direct fabrication of 3D microstructures inside transparent materials via a maskless, resistless process based on nonlinear multiphoton absorption, and has been shown to represent a superior method of fabricating 3D microfluidic biochips [13–18]. Irradiation of the interior of transparent materials with a focused fs laser beam modifies the physical, chemical, and/or optical properties of the material only within the focal volume of the beam. With translation of the focused laser beam
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