Film Materials on the Base of Bi 2 Te 3 and Microbattaries of Them
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FILM MATERIALS ON THE BASE OF BiaTe 3
AND
MICROBATTAPIES OF THEM. Lukyan
I. Anatychuk
Institute
Valeri
V.
Pazinkov
Thermoelectricity
of
Chernovtsy,USSR
Asboth numerous investigations
and practical based on film material
testify,thermobatteries principal
advanteges
thermobattery
as high technology
with a great number of
applications possess such
and possibility
of
legs manufacture-They
have also two main drawbacks : relatively small time stability and low efficiency due to shunting of substrate on which thermobattery
is
formed.
The possibility
of microminiaturization resulting instrument speed action and sensivity is the essential liarity
in
high pecu-
of the film thermobatteries.
To solve this
problem we've made up our mind to improve
those thermobattery diminish
properties
which secure advantages and
drawbacks.
EFFICIENCY INCREASE. First of all increase of effiency has been achieved in application of thin substrates made of low thermal conductance materials . The most acceptable are the substrates made of polyimide,which product of 0.5 tion
aminocarbon
the polycondensation
substrates of thickness have been produced by the centrifuga-
10Am
method from liquid
ductivity
Yepresents
and dycarbon acids.The
is
components.Polyimide
approximately 3*10"
film thickness lays in
thermal
con-
W*cm *K°l .Thermoelectric
the same range of values,so taken
into account the thermobattery geomentry,it heat flux shunting at about 1O%.This result be good and we think that the heat losses is questinable.
corresponds to is conceded to
further decrease of substrate
Next step in
thermobattery efficiency increase is the use with as high Z as possible.For this purpose we
of materials have used solid
Film materials by electronic sitionsby
solutions beamdifferent
magnetron
Te
n-
and p-type.
modifications
evaporation
of thermal
sputtering.Each
thods require the certain tain
based on Bi
have been produced by thermal
initial
depo-
of the referred memixture combination to ob-
the best results. Mat. Res. Soc. Symp. Proc. Vol. 234. @1991 Materials Research Society
202
am.a
'a
W~~a
a-
19.
V,
C-4 -a,
AMa
-
I,
,
,a
a>cm
a-
'a,
,x
kn
a,~
a,
a, a.a
a,
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a
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- i
203
STABILITYphotograph of
X-ray diffraction
has revealed
lyimide substrates
thermoelectric
their
films on pospots
microcrystalline
randomly oriented with regard
to neightbouring regioms.Their dimentions are approximately 0.1 - 0.2 /m. The
factors
influenced on
under study-They are tact
diffusion
process-Due
changeenvironmentcon-
to thermobattery area more than 5 -
film structure
for some hours at becomes
t
the thermal =200
0
- 300 C in
can also influbending-To
affects
10 mmn,vibration and other mechanical ence upon thin polyimide substratecausing stabilize
have been also
the film stability
: film structure
it's
annealing has been done the atmosphere
that
later
the working one.
To decrease have produced
rate
of the diffusion
thin
process on contacts we
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