From Micro to Nanometric Grain Size CVD Diamond Tools
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Mater. Res. Soc. Symp. Proc. Vol. 1243 © 2010 Materials Research Society
From Micro to Nanometric Grain Size CVD Diamond Tools Flávia A. Almeida1, Margarida Amaral2, Ermelinda Salgueiredo1, António J.S. Fernandes2, Florinda M. Costa2, Filipe J. Oliveira1, Rui F. Silva1 1 Ceramics Eng. Dept., CICECO, University of Aveiro, 3810-193 Aveiro, Portugal. 2 Physics Dept., I3N, University of Aveiro, 3810-193 Aveiro, Portugal. ABSTRACT CVD diamond coated tools are developed for applications as different as turning of cemented carbides and bone drilling. The diamond films are deposited by Hot Filament Chemical Vapor Deposition (HFCVD), with grain sizes varying from conventional micrometric (12 μm) to nanometric (< 100 nm) and film thickness up to 50 μm. Silicon nitride (Si3N4) ceramics are chosen for the base material in order to guarantee maximal adhesion. Both the micrometric and nanometric CVD diamond grades endure the cemented carbide turning showing slight cratering, having flank wear as the main wear mode. However, nanocrystalline diamond present the best behavior regarding cutting forces (
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