Gas Phase Nanoparticle Integration
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1002-N07-13
Gas Phase Nanoparticle Integration Chad R Barry1, Uwe Kortshagen2, and Heiko O Jacobs1 1 Department of Electrical and Computer Engineering, University of Minnesota, 200 Union Street SE, Minneapolis, MN, 55455 2 Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, MN, 55455 ABSTRACT We report on two gas phase nanoparticle integration processes to assemble nanomaterials onto desired areas on a substrate. We expect these processes to work with any material that can be charged. The processes offer self-aligned integration and could be applied to any nanomaterial device requiring site specific assembly. The Coulomb force process directs the assembly of nanoparticles onto charged surface areas with sub-100 nm resolution. The charging is accomplished using flexible nanostructured electrodes. Gas phase assembly systems are used to direct and monitor the assembly of nanoparticles onto the charge patterns with a lateral resolution of 50 nm. The second concept makes use of fringing fields. The fringing fields directed the assembly of nanoparticles into openings. The fringing fields can be confined to sub 50 nm sized areas and exceed 1 MV/m, acting as nanolenses. Gas phase assembly systems have been used to deposit silicon, germanium, metallic, and organic nanoparticles. INTRODUCTION Nanomaterials are considered the building blocks of future nanotechnological devices. These nanomaterials are most commonly fabricated using solution chemistry or gas phase chemistry and can provide a variety of functions. A number of concepts have been developed to print nanoparticles directly from powder and solution. Sub - one micrometer resolution assembly has been accomplished using charge directed nanoxerographic printing [1, 2] and topographically directed assembly incorporating both capillary and electrostatic forces [3, 4]. While the solution methods have emerged, directed self-assembly processes from the gas phase are not widely available but immensely important. Such processes would enable the integration of unique gas phase synthesized nanomaterials at desired locations on a substrate. The nanomaterial building blocks would not have to be transferred in solution as is currently the case. Solution concepts have their own set of problems ñ almost all of the reviewed receptor based assembly concepts [1, 2, 5-13] require surface functionization to prevent agglomeration or to guide the assembly which often interferes with the electronic or optical properties. Direct integration from the gas phase would support the use of well established passivation concepts to create high quality nanomaterial building blocks that maintain the electronic and optoelectronic functionality. Two nanoparticle assembly tools are presented that make use of electrostatic directed assembly to integrate functional materials at desired locations on a surface. The processes enable localized integration directly from the gas phase without transferring the materials into solution. The concept, based on electrostati
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