Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes
This book describes the developmental history of the vacuum system of the transmission electron microscope (TEM) at the Japan Electron Optics Laboratory (JEOL) from its inception to its use in today’s high-technology microscopes. The author and his collea
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Nagamitsu Yoshimura
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SpringerBriefs in Applied Sciences and Technology
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Nagamitsu Yoshimura
Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes
Dr. Nagamitsu Yoshimura 3-22-75 Fujimoto, Kokubunji Tokyo 185-0031, Japan
ISSN 2191-530X ISSN 2191-5318 (electronic) ISBN 978-4-431-54447-0 ISBN 978-4-431-54448-7 (eBook) DOI 10.1007/978-4-431-54448-7 Springer Tokyo Heidelberg New York Dordrecht London Library of Congress Control Number: 2013948408 © The Author(s) 2014 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. Exempted from this legal reservation are brief excerpts in connection with reviews or scholarly analysis or material supplied specifically for the purpose of being entered and executed on a computer system, for exclusive use by the purchaser of the work. Duplication of this publication or parts thereof is permitted only under the provisions of the Copyright Law of the Publisher’s location, in its current version, and permission for use must always be obtained from Springer. Permissions for use may be obtained through RightsLink at the Copyright Clearance Center. Violations are liable to prosecution under the respective Copyright Law. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. While the advice and information in this book are believed to be true and accurate at the date of publication, neither the authors nor the editors nor the publisher can accept any legal responsibility for any errors or omissions that may be made. The publisher makes no warranty, express or implied, with respect to the material contained herein. Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
Preface
This book describes the history of how ultrahigh-vacuum (UHV) JEOL electron microscopes (JEM series) were brought into existence, from their conception to the birth of the electron microscope. My co-workers and I engaged in developing vacuum technology for electron microscopes at JEOL (Japan Electron Optics Laboratory Co. Ltd.) for many years. This book now presents the UHV technology of JEMs. The column of the electron microscope (EM), including the camera chamber, is very complex in construction and is composed of many units and parts. A high-tension (HT) electron gun
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