Impact of Small Miscuts of (0001) Sapphire on the Growth of Al x Ga 1-x N/AlN

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E4.34.1

Impact of Small Miscuts of (0001) Sapphire on the Growth of AlxGa1-xN /AlN Zheng Gong, Wenhong Sun, Jianping Zhang1, Mikhail E. Gaevski, Hongmei Wang, Jinwei Yang, and M. Asif Khan Department of Electrical Engineering, University of South Carolina, 301 South Main Street, Columbia, SC 29208, USA 1 Sensor Electronic Technology Inc., Columbia, SC 29209, USA ABSTRACT In this paper, using chemical etching, atomic force microscope (AFM) and Highresolution X-ray diffraction (HRXRD), we report a study of the effect of various small miscuts of (0001) sapphire substrate (

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