Improvement on uniformity of diamond-like carbon coatings inside metal tubes using high power pulse supply
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Improvement on uniformity of diamond‑like carbon coatings inside metal tubes using high power pulse supply Minglan Zhang1,2 · Xubing Wei1 · Linggang Kong2 · Guangan Zhang1,3 · Yan Wang1 · Zhiguo Wu3 Received: 13 April 2020 / Accepted: 15 June 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract Hollow cathode plasma-enhanced chemical vapor deposition (HC-PECVD) technique with high power pulse supply was employed to deposit multi-layer diamond-like carbon (DLC) coatings on the inner surface of 304 stainless steel (SS304) tubes. Pulse width of high power pulse supply was varied from 2 to 20 μs with constant frequency, negative bias voltage, and power to investigate the effects on the uniformity, microstructure, mechanical properties, and tribological performance of the deposited coatings. The results implying the uniformity of DLC coatings inside SS304 tubes can be improved significantly using the high power pulse supply. At the low pulse width, the uniformity of DLC coatings is outstanding along the axis direction of tube. At the high pulse width, the uniformity of DLC coatings became poor along the axis direction of tube as the plasma density and deposition rate are high; however, the mechanical properties and tribological performance are superior. Besides, the ion bombardment effect and the heating effect appear the competition relationship inside SS304 tubes with the increase of pulse width. Keywords HC-PECVD · Diamond-like carbon · High power pulse supply · Uniformity
1 Introduction During the last decades, it is a huge challenge to make surface modification on the inner wall of metal tube in industrial applications, especially for the long tubes, including hydraulic devices, oil-well tubing, and cylinder liners [1]. Ensinger used a conical-shaped rod inserted into a tube to apply a high-energy ion beam and coat the tube with metallic materials [2]. Bardos and Barankova developed an RF
* Linggang Kong [email protected] * Guangan Zhang [email protected] 1
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, People’s Republic of China
2
Key Laboratory of Opto‑Electronic Technology and Intelligent Control (Ministry of Education), Lanzhou Jiaotong University, Lanzhou 730070, People’s Republic of China
3
Institute of Nanomaterials Application Technology, Gansu Academy of Science, Lanzhou 730000, People’s Republic of China
hollow cathode technique to deposit TiN coatings on the tube with 8 mm in inner diameter [3]. A cylindrical magnetron sputtering system reported by Hosokawa et al. can deposit solid metals and ceramic materials (TiN) inside tubes [4]. At present, lots of deposition technologies of inner coatings have been extensively applied in the industrial production, such as lining [5], electroplating [6], and spraying [7]. Diamond-like carbon (DLC) coating has been shown to provide many excellent properties, such as high hardness, minimal wear, a low friction coefficient, and chemical inertness [
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