Industrial Applications of Ion Implantation
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INDUSTRIAL APPLICATIONS OF ION IMPLANTATION ,.K. HTPAVrCIF'ý Zymet, Inc., 33 Cherry Hill Drive Danvers, MA 01923 ABSTRACT The use of ion implantation for non-semiconductor applications has evolved steadily To date, industrial trials over the last decade. of this technology have been mainly directed at the wear reduction of steel and cobalt-cemented tungsten carbide tools by high dose nitrogen implantation. However, several other surface sensitive properties of metals such as fatigue, aqueous corrosion, and oxidation, have benefitted from either i)direct ion implantation of various ion species, ii)the use of ion beams to "intermix" a deposited thin film on steel or titanium alloy deposition of material in substrates, or iii)the conjunction with simultaneous ion bombardment. This paper will concentrate on applications that have experienced the most industrial trials, mainly high dose nitrogen implantation for reducing wear, but will present the features of the other ion beam based techniques that will make them appear particularly promising for future commercial utilization. INTRODUCTION It has been approximately ten years since the first publications by Hartley and colleagues at Harwell of the effect Since of high dose nitrogen implantation on wear reduction [1]. that time, numerous laboratories have gotten involved in R&D applications involving both mechanical and chemical surface-sensitive properties, many of which are presented in In spite of the large number of properties this proceedings. (e.g., fatigue, aqueous corrosion, high temperature oxidation) that have shown significant improvements due to ion implantation, to date, the vast majority of industrial trials has remained in the area of wear. WEAR REDUCTION OF INDUSTRIAL TOOLING Wear improvements have been seen in both steel as well as It is Co-cemented WC tools under a variety of applications. important to note that nitrogen implantation has been found ineffective for those applications involving high operating This temperatures such as found in chip forming applications. is because of the instability of the nitrogen-defect structures that are thought to be responsible for improving the wear resistance. There is direct evidence from several groups [2,3,41 that there is an anomalous retention of nitrogen in the wear scar of implanted wear samples and a persistence of wear resistance after the removal of material corresponding to 10-50 There is however still times the original range of nitrogen.
Mat.
Res. Soc. Symp. Proc. Vol.
27 (1984) CElsevier Science Publishinq Co.,
Inc.
622
considerable debate as to what mechanism or mechanisms are Dearnaley et al. [2] have responsible for this persistence. suggested that the nitrogen decorates dislocation structures and migrates under the locally high temperatures produced at Baumvol and associates [51 interacting asperities during wear. have seen evidence for nitride and carbo-nitride formation following implantation and subsequent dissolution at elevated temperatures using conversion electron Mossbauer spectros
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