Integrated Smart Sensors Design and Calibration
1 1. 1 Introduction The (signal processing and storage) capacity ofthe human brain enables us to become powerful autonomous beings, but only if our brains operate in conjunction with (at least some of) our senses and muscles. Using these organs, we can in
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INTEGRATED SMART SENSORS DESIGN AND CALIBRATION
by
Gert van der Horn University of Delft
and
Johan L. Huijsing University of Delft
SPRINGER-SCIENCE+BUSINESS MEDIA, B.V.
A C.I.P. Catalogue record for this book is available from the Library of Congress.
ISBN 978-1-4419-5016-1 ISBN 978-1-4757-2890-3 (eBook) DOI 10.1007/978-1-4757-2890-3
Printed on acid-free paper
AII Rights Reserved
© 1998 Springer Science+Business Media Dordrecht Originally published by Kluwer Academic Publishers in 1998 Softcover reprint of the hardcover 1st edition 1998 No part of the material protected by this copyright notice may be reproduced or utilized in any fonn or by any meanS, electronic or mechanical, including photocopying, recording or by any information storage and retrieval system, without written pennission from the copyright owner.
Table of Contents
1
lntroduction
1
1.1
Introduction ..............................................................
1.2
Sensors and actuators ............................................... 2
1.3
Integrated smart sensors ........................................... 5
1.4
Measurement errors and correction .......................... 6 l.4.1 1.4.2 1.4.3 l.4.4 l.4.5 l.4.6
1.5
1
Process variations and time variations .......................... 7 Calibration ..................................................................... 8 Se1f-testing ................................................................... Il Se1f-calibration ............................................................ 13 Redundancy improvement Of feedforward testing ...... 15 ConcJuding remarks ..................................................... 16
Objective and Organization ................................... 16 1.5.1 Objective ...................................................................... 16 1.5.2 Organization ................................................................ 17 1.5.3 Design constraints ....................................................... 17
References ........................................................................... 19
2 lntegrated Smart Sensor Concept
21
2.1
Introduction............................................................ 21
2.2
Silicon sensors..... ................................................... 22 2.2.1 Temperature sensor ..................................................... 22 2.2.2 Pressure sensor ............................................................ 23 2.2.3 Measurement errors ..................................................... 25
INTEGRATED SMART SENSORS:
Design and Calibration
v
Table of Contents
2.3
Analog Interface circuits ......................................... 27 2.3.1 Temperature sensor readout ........................................ 27 2.3.2 Pressure sensor readout ............................................... 32
2.4
Analog-to-Digital conversion ................................. 33 2.4.1
2.5
Sigma-delta converter ................................................. 34
Digital bus or microcontroller interface ..........
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