Laser Ablation Deposition of Diamond-Like Carbon Films
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LASER ABLATION DEPOSITION OF DIAMOND-LIKE CARBON FILMS S. LEPPAVUORI, J. LEVOSKA, J.VAARA AND 0. KUSMARTSEVA University of Oulu, Microelectronics and Material Physics Laboratories, SF-90570 Oulu, Finland ABSTRACT Diamond-like carbon (DLC) thin films were prepared by laser ablation deposition. The deposition process was carried out in a vacuum chamber at a base pressure of about 10-5 mbar using the focused beam from either an Nd:YAG laser or an XeCl excimer laser and a pyrolytic graphite target. The peak power density of the laser beam was about 108 W/cm 2 , and 1010 W/cm 2 . respectively. The effect of varying power density of the laser beam also was examined. The films were deposited on fused silica and silicon single crystal substrates between room temperature and 600 °C with and without hydrogen addition. The properties of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), micro-Raman and Fourier transform infrared (FTIR) spectrometry, electrical conductivity and optical measurements. The best films were insulating (o
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