Laser Micro and Nano Processing of Metals , Ceramics , and Polymers
Laser -based material processing is well investigated for structuring , modification , and bonding of metals , ceramics , glasses, and polymers . Especially for material processing on micrometer, and nanometer scale laser-assisted processes will very like
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Laser Micro and Nano Processing of Metals, Ceramics, and Polymers Wilhelm Pfleging, Robert Kohler, Isabelle Südmeyer and Magnus Rohde
Abstract Laser-based material processing is well investigated for structuring, modification, and bonding of metals, ceramics, glasses, and polymers. Especially for material processing on micrometer, and nanometer scale laser-assisted processes will very likely become more prevalent as lasers offer more cost-effective solutions for advanced material research, and application. Laser ablation, and surface modification are suitable for direct patterning of materials and their surface properties. Lasers allow rapid prototyping and small-batch manufacturing. They can also be used to pattern moving substrates, permitting fly-processing of large areas at reasonable speed. Different types of laser processes such as ablation, modification, and welding can be successfully combined in order to enable a high grade of bulk and surface functionality. Ultraviolet lasers favored for precise and debris-free patterns can be generated without the need for masks, resist materials, or chemicals. Machining of materials, for faster operation, thermally driven laser processes using NIR and IR laser radiation, could be increasingly attractive for a real rapid manufacturing.
8.1 Introduction In micro- and nanosystems laser-assisted processes are of particular interest for the rapid fabrication and development of devices for microfluidics, bioanalytics, or biomedical applications [1, 2]. For these application fields laser processing is successfully applied with respect to laser ablation, micropatterning, and packaging [3, 4]. W. Pfleging (B) · R. Kohler · I. Südmeyer · M. Rohde Karlsruhe Nano Micro Facility, Institute for Applied Materials (IAM-AWP), Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany e-mail: [email protected] M. Rohde e-mail: [email protected]
J. Dutta Majumdar and I. Manna (eds.), Laser-Assisted Fabrication of Materials, Springer Series in Materials Science 161, DOI: 10.1007/978-3-642-28359-8_8, © Springer-Verlag Berlin Heidelberg 2013
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The improvement of properties on a local scale can be achieved by applying surface modification techniques such as laser dispersing and alloying of brittle materials such as ceramics and glasses. The fabrication of stable joints is still a challenge as far as small parts, thin metal sheets, and dissimilar materials such as metal-ceramic combinations are concerned, in which the development and application of laser processes are playing an important role. Advanced functional surface patterns with high lateral resolution can be obtained by combination of laser micro- or nanostructuring and laser-induced surface modification. For this purpose, thermally driven as well as photolytically driven processes can be applied [2]. This depends on the process strategy. For example, rapid laser surface annealing can be an appropriate tool for the realization or adjustment of nan
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