Lead Zirconate Titanate Thick Film Prepared by Electrophoretic Deposition from Oxide Mixture
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Lead zirconate titanate (PbZr0.52Ti0.48O3; PZT) thick film with a thickness of 70 m was prepared by the electrophoretic deposition method from a raw oxide mixture of PbO, ZrO2, and TiO2. X-ray diffraction and scanning electron microscopy were used to characterize the sintered PZT thick film. Single phase PZT was observed in the films sintered at 900 °C and above. The film sintered at 1000 °C for 30 min exhibited a dielectric constant of 1050 with a dielectric loss of about 0.05 measured at 1 kHz, a maximum polarization of 29 C/cm2, a remnant polarization of 19 C/cm2, and a coercive field of 21 kV/cm. This simple process to form PZT thick films may also be applied to the preparation of other multicomponent ceramics and ceramic films.
Lead zirconate titanate (PZT) is an important material for a variety of applications due to its excellent ferroelectric, piezoelectric, pyroelectric, and electro-optical properties.1 PZT thin films prepared by sputtering,2 pulsed laser ablation,3 metalorganic chemical vapor deposition (MOCVD),4 and the sol-gel process5–8 have been widely investigated during recent decades. However, it is noted that these techniques are mostly used to prepare PZT films less than 10 m in thickness. In the case of achieving large displacement of the PZT layers, such thicknesses are not sufficient, and thick films up to tens of micrometers are then required.8 PZT thick films have mostly been fabricated by the screen-printing technique, where PZT pastes are prepared and printed onto Al2O3 or silicon substrates.9–12 Although screen printing is a successful method for producing PZT as well as other ceramic thick films, this technique has some problems, such as requiring special equipment, the inability to deposit samples with complicated shapes, and being very time consuming. Electrophoretic deposition (EPD), which has been used to deposit ceramic13 and ceramic composite coatings 14,15 and superconductor thick films,16–18 is also a method for the preparation of PZT thick films.19,20 Besides the advantages such as simple processing, low-cost facility requirement, and low processing temperature, EPD is also superior to the screenprinting technique because the films can be deposited onto complex shapes. PZT thick films deposited by EPD have been reported by some researchers, where compound PZT was used as a starting material.19,20 In this paper, formation of PZT thick films with thickness of up to 70 m produced by EPD directly from the mixture of raw PbO, ZrO2, and TiO2 is reported. J. Mater. Res., Vol. 17, No. 5, May 2002
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The suspension for EPD in the present work was created by dispersing PbO, ZrO2, and TiO2 raw powders in alcohol for producing the nominal composition of Pb(Zr0.52Ti0.48)O3 (designated as PZT hereafter). The powders were dispersed with an ultrasonic horn for 10 min. HNO3 of concentration of 10% was used to modify the pH value of the suspension to 5–6. The deposition was carried out at a constant voltage of 100 V between two parallel
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