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1007-S04-41

Low Temperature Deposition of Metal Oxide Thin Films in Supercritical Carbon Dioxide using Metal-organic Precursors Theodosia Gougousi, and Zhiying Chen Physics, UMBC, 1000 Hilltop Circle, Baltimore, MD, 21250

ABSTRACT A novel chemical route in thin film formation that includes the use of inorganic and organic peroxides and metal organic complexes soluble in supercritical carbon dioxide has been investigated for the deposition of alumina, titania and zirconia thin films at low temperatures (

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