Mechanical Properties of Silicon Based Compounds: Silicides

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based c

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Joshua Pelleg

Mechanical Properties of Silicon Based Compounds: Silicides

Engineering Materials

This series provides topical information on innovative, structural and functional materials and composites with applications in optical, electrical, mechanical, civil, aeronautical, medical, bio- and nano-engineering. The individual volumes are complete, comprehensive monographs covering the structure, properties, manufacturing process and applications of these materials. This multidisciplinary series is devoted to professionals, students and all those interested in the latest developments in the Materials Science field.

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Joshua Pelleg

Mechanical Properties of Silicon Based Compounds: Silicides


Joshua Pelleg Department of Materials Engineering Ben-Gurion University of the Negev Beer Sheva, Israel

ISSN 1612-1317 ISSN 1868-1212 (electronic) Engineering Materials ISBN 978-3-030-22597-1 ISBN 978-3-030-22598-8 (eBook) © Springer Nature Switzerland AG 2019 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, expressed or implied, with respect to the material contained herein or for any errors or omissions that may have been made. The publisher remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. This Springer imprint is published by the registered company Springer Nature Switzerland AG The registered company address is: Gewerbestrasse 11, 6330 Cham, Switzerland

Dissatisfaction and restlessness are the key for human progress Joshua Pelleg

To my wife Ada and my children, Deenah and her late husband Gidon Barak, Ruth and Christer Kallevag, Shlomit and Asher Pelleg and to my grandchildren: Roy, Tal, Rotem and Noa Barak; Ella and Maya Kallevag; and Ofir and Ori Pelleg.


This book on “Silicides: Mechanical Properties” is unique since all other treatments of this subject appear only in papers and even then only as a part of the general properties of silicides, mainly because of their importance in device fabrication as electronic p