Mechanical Testing at the Micro/Nanoscale
Mechanical testing of micro- and nanoscale materials such as thin films, nanotubes and nanowires, and cellular and subcellular biomaterials is a significant step towards the realization of nanoscale devices and is essential for the commercialization of mi
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Mechanical T
30. Mechanical Testing at the Micro/Nanoscale
Mechanical testing of micro- and nanoscale materials such as thin films, nanotubes and nanowires, and cellular and subcellular biomaterials is a significant step towards the realization of nanoscale devices and is essential for the commercialization of microscale integrated systems. The challenges in mechanical testing at these smaller length scales emanate from the very basic (specimen preparation and manipulation, high-resolution force and displacement sensing) to complex (enhanced multiphysics coupling, specimen–environment interaction) experimental issues. In this chapter, we attempt to focus on these issues in light of the existing and potential solutions as we review the state of the art in micro- and nanoscale mechanical testing as well as our understanding of materials behavior at these length scales. This chapter is divided into six sections. The first section introduces the research problem in micro/nanomechanical testing and describes the evolution for the need of this research area with examples in micro/nanoscale materials phenomena. The second section describes the challenges in nanomechanical testing and commonly studied materials. The third section provides a broad overview of the available tools and techniques. The vastness of the relevant literature means that this review essentially is incomplete and instead, the section focuses on the techniques that are most commonly used or have very high potential.
This chapter is an account of the recent progresses in the development of characterization tools for materials with at least one dimension at the micro/nanoscale. These are bulk three-dimensional materials with ultrafine grains, two-dimensional materials such as thin films with micronand sub-micron-scale thickness, one-dimensional nanotubes and nanowires with diameters on the order of a few to few tens of microns, and biological materials that
30.1 Evolution of Micro/Nanomechanical Testing........... 840 30.2 Novel Materials and Challenges ............. 841 30.3 Micro/Nanomechanical Testing Techniques ............................... 30.3.1 Classification ............................. 30.3.2 Challenges in Micro/Nanomechanical Testing . 30.3.3 Micro/Nanomechanical Testing Tools .............................. 30.3.4 Nontraditional (MEMS) Tools ........ 30.3.5 AFM-Based Tools ........................ 30.3.6 Nanoindentation ....................... 30.3.7 Other Tools ................................
842 842 843 844 847 851 853 856
30.4 Biomaterial Testing Techniques ............. 856 30.5 Discussions and Future Directions .......... 859 30.6 Further Reading ................................... 862 References .................................................. 862
The fourth section is devoted to bio-materials, which are ultra compliant and sensitive to the environment and thus present the ultimate challenge in mechanical testing. Section five provides a critical analysis of the available techniques and the emerging problems in mechanical tes
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