Mechanics and Physics of Precise Vacuum Mechanisms
In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comp
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E.A. Deulin V.P. Mikhailov Y.V. Panfilov R.A. Nevshupa
Mechanics and Physics of Precise Vacuum Mechanisms 123
Mechanics and Physics of Precise Vacuum Mechanisms
FLUID MECHANICS AND ITS APPLICATIONS Volume 91
Series Editor: R. MOREAU MADYLAM Ecole Nationale Supérieure d’Hydraulique de Grenoble Boîte Postale 95 38402 Saint Martin d’Hères Cedex, France
Aims and Scope of the Series The purpose of this series is to focus on subjects in which fluid mechanics plays a fundamental role. As well as the more traditional applications of aeronautics, hydraulics, heat and mass transfer etc., books will be published dealing with topics which are currently in a state of rapid development, such as turbulence, suspensions and multiphase fluids, super and hypersonic flows and numerical modeling techniques. It is a widely held view that it is the interdisciplinary subjects that will receive intense scientific attention, bringing them to the forefront of technological advancement. Fluids have the ability to transport matter and its properties as well as to transmit force, therefore fluid mechanics is a subject that is particularly open to cross fertilization with other sciences and disciplines of engineering. The subject of fluid mechanics will be highly relevant in domains such as chemical, metallurgical, biological and ecological engineering. This series is particularly open to such new multidisciplinary domains. The median level of presentation is the first year graduate student. Some texts are monographs defining the current state of a field; others are accessible to final year undergraduates; but essentially the emphasis is on readability and clarity.
For other titles published in this series, go to www.springer.com/series/5980
E.A. Deulin • V.P. Mikhailov • Yu.V. Panfilov R.A. Nevshupa
Mechanics and Physics of Precise Vacuum Mechanisms
E.A. Deulin Bauman Moscow State Technical University 2nd Baumanskaya 5 Moskva 107005 Russia [email protected]
V.P. Mikhailov Bauman Moscow State Technical University 2nd Baumanskaya 5 Moskva 107005 Russia
Yu.V. Panfilov Bauman Moscow State Technical University 2nd Baumanskaya 5 Moskva 107005 Russia
R.A. Nevshupa Bauman Moscow State Technical University 2nd Baumanskaya 5 Moskva 107005 Russia
This book is a revised and updated translation of the original Russian work: Mechanics and Physics of Precise Vacuum Mechanisms (2 vols.), Moscow, NPK “Intelvac”, 2000, 2001.
ISSN 0926-5112 ISBN 978-90-481-2519-7 e-ISBN 978-90-481-2520-3 DOI 10.1007/978-90-481-2520-3 Springer Dordrecht Heidelberg London New York Library of Congress Control Number: 2009939688 © Springer Science+Business Media B.V. 2010 No part of this work may be reproduced, stored in a retrieval system, or transmitted in any form or by any means, electronic, mechanical, photocopying, microfilming, recording or otherwise, without written permission from the Publisher, with the exception of any material supplied specifically for the purpose of being entered and executed on a computer system, for exclusive use by the purchaser of th
