MEMS Linear and Nonlinear Statics and Dynamics
MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatmen
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MICROSYSTEMS Series Editors Roger T. Howe Stanford University Antonio J. Ricco NASA Ames Research Center
For further volumes: http://www.springer.com/series/6289
Mohammad I. Younis
MEMS Linear and Nonlinear Statics and Dynamics
2123
Ph.D. Mohammad I. Younis Department of Mechanical Engineering State University of New York Binghamton, NY USA [email protected]
ISSN 1389-2134 ISBN 978-1-4419-6019-1 e-ISBN 978-1-4419-6020-7 DOI 10.1007/978-1-4419-6020-7 Springer New York Dordrecht Heidelberg London Library of Congress Control Number: 2011930834 © Springer Science+Business Media, LLC 2011 All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
To my parents Ibrahim and Halemah My wife Ola and our sons Ibrahim, Muhmoud, and Mutaz
Preface
Several decades have passed by since the discovery and development of microelectro-mechanical systems (MEMS). This technology has reached a level of maturity that, today, several MEMS devices are being used in our every-day life, ranging from accelerometers and pressure sensors in cars, micro-mirrors in Plasma TVs, radiofrequency (RF) switches and microphones in cell phones, and inertia sensors in video games. Fabrication methods of MEMS, such as bulk and surface micromachining, are now well-known and almost standardized. Nowadays, hundreds of foundries around the world offer numerous fabrication services that can translate the imagination of a MEMS designer of a device into reality. Even with the maturity of fabrication and commercialization, MEMS is still one of the hottest evolving areas in science and engineering, where scientists from across various disciplines investigate, brainstorm, and collaborate to invent smarter devices, develop new technologies, and innovate unique solutions. With the increasing pressure for sensors and actuators of sophisticated functionalities, which are self-powered, self-calibrated, and self-tested, MEMS are expected to remain the sought-after technology of scientists for many years to come. However, with this growing demand on the MEMS technology come great challenges. Designers are now aiming to achieve complicated objectives while meeting a long list of specifications related to sensitivity, fabrication, system integration, packaging, and reliability. These challenges have cre
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