Metal coatings on SiC nanowires by plasma-enhanced chemical vapor deposition

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Metal coatings on SiC nanowires by plasma-enhanced chemical vapor deposition Aaron D. LaLondea) and M. Grant Norton School of Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164-2920

David N. McIlroy, Daqing Zhang, Radhakrishnan Padmanabhan, Abdullah Alkhateeb, Hongmei Han, Nicholas Lane, and Zachery Holman Department of Physics, University of Idaho, Moscow, Idaho 83844-0903 (Received 8 July 2004; accepted 3 December 2004)

Coating of nanowires is being investigated to broaden potential uses for future applications. Coatings of Ni and Pt nanoparticles have been synthesized on silicon carbide nanowires by plasma enhanced chemical vapor deposition. Coatings with high particle densities with average particle diameters of 2.76 and 3.28 nm for Pt and Ni, respectively, were formed with narrow size distributions. Plasma enhanced chemical vapor deposition appears to be an efficient method for production of metal coatings on nanowires.

Nanomaterials and their potential applications are among the most pertinent issues on the scientific community’s research agenda. Some of the more promising nanomaterials are nanowires (NWs), offering a high degree of versatility for future uses in applications ranging from sensors to biological research. Nanowires present the possibility of a wide range of uses because of their relative ease of production and the numerous types of materials available, including metallic, semiconducting, and dielectric NWs.1 Nanowires will be able to be tailored to both specific and broad ranging applications and can be used as templates for coatings. These coatings can alter specific properties of the wires and may be utilized to make nanoscale devices. Coated NWs should prove to be useful and enhance their versatility. Previous research has shown carbon nanotubes (CNTs) used as templates for the deposition of metal particles.2–9 Possible applications for such coated nanostructures include reinforced metal-nanofiber materials,10 catalysis,2,9,11,12 scanning tunneling microscope tips,6 and chemical sensors.13,14 Various methods for metallization of CNTs include pulsed laser deposition (PLD),6 supercritical fluid,7–9 adsorption,2 electrochemical deposition,3 physical vapor deposition (PVD),5 and electroless

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Address all correspondence to this author. e-mail: [email protected] DOI: 10.1557/JMR.2005.0074 J. Mater. Res., Vol. 20, No. 3, Mar 2005

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plating.4 For example, Ye et al.7,9 used hydrogen reduction of metal precursors using supercritical carbon dioxide (CO2) as a reaction medium to deposit nanoparticles of Pd, Rh, and Ru, on multiwalled CNTs. These experiments yielded well-dispersed nanoparticles of Pd, Rh, and Ru with diameters of approximately 5–10 nm, 3–5 nm, and 1 nm, respectively. A chemical-vapor-deposition method was reported by Xu et al.3 for Ni coating CNTs utilizing porous anodic aluminum oxide (AAO). In this study, AAO was used to produce CNTs via chemical vapor deposition. Electrochemical d