Metallurgical factors influencing the corrosion of aluminum, Al-Cu, and Al-Si alloy thin films in dilute hydrofluoric so
- PDF / 3,621,391 Bytes
- 15 Pages / 597 x 774 pts Page_size
- 54 Downloads / 168 Views
I.
INTRODUCTION
A L U M I N U M alloys have replaced pure A1 thin films for interconnections in very large-scale integrated circuits to meet process and reliability requirements.ill Aluminum is often alloyed with Si and/or Cu. However, Cu, due to its low solubility in aluminum (e.g.,
Data Loading...
