Microactuators for Dual-Stage Servo Systems in Magnetic Disk Files
This chapter discusses the design and fabrication of electrostatic MEMS microactuators and the design of dual-stage servo systems in disk drives. It introduces fundamental requirements of disk drive servo systems, along with challenges posed by storage de
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Microactuator 32.1 Design of the Electrostatic Microactuator 32.1.1 Disk Drive Structural Requirements ............................. 32.1.2 Dual-Stage Servo Configurations ... 32.1.3 Electrostatic Microactuators: Comb-Drives vs. Parallel-Plates .... 32.1.4 Position Sensing ......................... 32.1.5 Electrostatic Microactuator Designs for Disk Drives............................. 32.2 Fabrication .......................................... 32.2.1 Basic Requirements ..................... 32.2.2 Electrostatic Microactuator Fabrication Example .................... 32.2.3 Electrostatic Microactuator Example Two .............................. 32.2.4 Other Fabrication Processes .......... 32.2.5 Suspension-Level Fabrication Processes................... 32.2.6 Actuated Head Fabrication ........... 32.3 Servo Control Design of MEMS Microactuator Dual-Stage Servo Systems....................................... 32.3.1 Introduction to Disk Drive Servo Control............ 32.3.2 Overview of Dual-Stage Servo Control Design Methodologies....... 32.3.3 Track-Following Controller Design for a MEMS Microactuator Dual-Stage Servo System .............. 32.3.4 Dual-Stage Seek Control Design ....
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32.4 Conclusions and Outlook ....................... 978 References .................................................. 979
developed to compensate for the variations in the microactuator’s resonance mode. In the µ-synthesis design, robust controllers can be synthesized by using additive and parametric uncertainties to characterize the un-modeled dynamics of the VCM and the variations in the microactuator’s resonance mode. Finally, the chapter also introduces a dual-stage short-span seek control scheme based on decoupled feed forward reference trajectories generations.
Part E 32
This chapter discusses the design and fabrication of electrostatic MEMS microactuators and the design of dual-stage servo systems in disk drives. It introduces fundamental requirements of disk drive servo systems, along with challenges posed by storage densities increases. It describes three potential dual-stage configurations and focuses on actuated slider assemblies using electrostatic MEMS microactuators. The authors discuss major electrostatic actuator design issues, such as linear versus rotary motion, electrostatic array configuration, and differential operation. Capacitive and piezoresistive elements may be used to sense relative slider position, while integrated gimbals and structural isolation may prove useful in improving performance. A detailed design example based on a translational, micromolded actuator illustrates several of these concepts and is accompanied by theoretical and experimental results. The chapter continues to discuss MEMS microactuator fabrication. It describes several processes for obtaining appropriate electrostatic devices including micromolding, deep-reactive ion etching, and electroplating. The primary goal of these processes is to obtain very high-aspect r
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