Micropatterned lead zirconium titanate thin films
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¨ zenbas¸ M. O Department of Metallurgical and Materials Engineering, Middle East Technical University, Ankara 06531, Turkey
C-M. Chun,b) M. Trau,c) and I.A. Aksay Department of Chemical Engineering, Princeton University, Princeton, New Jersey 08544-5263 (Received 20 February 2003; accepted 26 February 2003)
Micropatterning of Pb(Zr0.52Ti0.48)O3 (PZT) thin films with line features as small as 350 nm was demonstrated through capillary molding of organometallic solutions within the continuous channels of an elastomeric mold. Despite the large stresses that develop during the evaporation of the solvent, pyrolysis of the organics, and the densification and crystallization of the inorganic gel, the patterned crystalline PZT films were crack-free and mechanically robust. Flawless regions as large as 1 cm2 were obtained. The cross-sectional shape of the patterned PZT lines was trapezoidlike. Single perovskite PZT grains that formed during annealing at 600–700 °C completely filled the cross-sectional area of the patterned lines. Lead acetate, zirconium propoxide, and titanium isopropoxide were used as the starting materials. Substrates used included silver tape, stainless steel plate, silicon wafer, and platinum-coated silicon wafer.
I. INTRODUCTION
Ferroelectric thin films are playing an increasingly important role in integrated electronic devices as capacitors, piezoelectric materials (transducers), pyroelectric detectors, electro-optic materials, thermistors, and dielectrics.1 Ferroelectric thin films with micron-scale patterns are also receiving increasing interest for use in microelectromechanical systems (MEMS).2 MEMS combine the traditional silicon-based integrated-circuit electronics with micromechanical sensing and actuating components. The term MEMS has become synonymous with many types of microfabricated devices such as accelerometers, infrared detectors, flow meters, pumps, motors, and mechanical components.3 These devices have lateral dimensions in the range of 0.1 m to 1 mm. Commercial applications for MEMS already span biomedical (e.g., blood-pressure sensors),4 manufacturing (e.g., microflow controllers), 5 information processing (e.g., displays),6 and automotive (e.g., accelerometers)7 industries. More applications are projected in consumer electronics, manufacturing control, communications,
a)
Present address: General Electric, Corporate Research & Development, Schnectady, New York 12301. b) Present address: Exxon-Mobil Research & Engineering Company, Annandale, New Jersey 08801. c) Present address: Department of Chemistry, University of Queensland, St. Lucia, QLD4067, Australia. J. Mater. Res., Vol. 18, No. 5, May 2003
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and aerospace. 8–10 The superior piezoelectric and pyroelectric properties of inorganic ferroelectric materials make them ideal for use in microactuators and microsensors. The ability to create submicron-sized patterned ceramic structures is highly desirable in the fabrication of microelectronics, optical devices, and micromec
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