Micropillar Arrays for High Sensitivity Sensors

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Micropillar Arrays for High Sensitivity Sensors Youngwoo Kim1,2 and Nakhiah Goulbourne2 Department of Mechanical Engineering, The University of Michigan, Ann Arbor, MI 48109, U.S.A. 2 Department of Aerospace Engineering, The University of Michigan, Ann Arbor, MI 48109, U.S.A. 1

ABSTRACT In this paper, we report on a new micropillar sensor array that is stretchable, flexible, and has high sensitivity in the tactile sensing regime (